Micro Electro Mechanical Systems

Bibliographic Details
Corporate Author:	SpringerLink (Online service)
Other Authors:	Huang, Qing-An (Editor)
Summary:	text
Language:	English
Published:	Singapore : Springer Nature Singapore : Imprint: Springer, 2017.
Series:	Micro/Nano Technologies, 2
Subjects:	Microtechnology. Microelectromechanical systems. Mechatronics. Electronics. Telecommunication. Microsystems and MEMS. Electronics and Microelectronics, Instrumentation. Microwaves, RF Engineering and Optical Communications.
Online Access:	https://doi.org/10.1007/978-981-10-2798-7
Format:	Electronic Book

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