Micro Electro Mechanical Systems
| Erakunde egilea: | |
|---|---|
| Beste egile batzuk: | |
| Gaia: | text |
| Hizkuntza: | ingelesa |
| Argitaratua: |
Singapore :
Springer Nature Singapore : Imprint: Springer,
2017.
|
| Saila: | Micro/Nano Technologies,
2 |
| Gaiak: | |
| Sarrera elektronikoa: | https://doi.org/10.1007/978-981-10-2798-7 |
| Formatua: | Baliabide elektronikoa Liburua |
Aurkibidea:
- Device Physics
- Scaling effect
- Sensors
- Actuators
- RF MEMS
- Micro fluid and bio MEMS
- Integration techniques
- Micro systems.