High-intensity implantation of titanium into silicon using repetitively pulsed high-density beams
| Parent link: | European Physical Journal Plus.— .— New York: Springer Science+Business Media LLC. Vol. 140.— 2025.— Article number 1031, 9 p. |
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| Other Authors: | , , , , |
| Summary: | Title screen The article presents the results of studies of repetitively pulsed implantation of silicon by high-power density titanium ion beams in the mode of simultaneous energy impact of the beam and rotation of the irradiated target. The article demonstrates the possibility of forming deeply modified surface layers with a thickness of up to 1.5 μm when the sample irradiation dose increases from 3.5×1019 to 1.2×1020 ion/cm2. The elemental composition of the samples was analyzed using the Rutherford backscattering (RBS) method. The results of the phase composition of the studied samples are presented Текстовый файл AM_Agreement |
| Language: | English |
| Published: |
2025
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| Subjects: | |
| Online Access: | https://doi.org/10.1140/epjp/s13360-025-06977-8 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=684096 |
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| 200 | 1 | |a High-intensity implantation of titanium into silicon using repetitively pulsed high-density beams |f Ivanova Anna, Korneva Olga, Bozhko Irina [et al.] | |
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| 330 | |a The article presents the results of studies of repetitively pulsed implantation of silicon by high-power density titanium ion beams in the mode of simultaneous energy impact of the beam and rotation of the irradiated target. The article demonstrates the possibility of forming deeply modified surface layers with a thickness of up to 1.5 μm when the sample irradiation dose increases from 3.5×1019 to 1.2×1020 ion/cm2. The elemental composition of the samples was analyzed using the Rutherford backscattering (RBS) method. The results of the phase composition of the studied samples are presented | ||
| 336 | |a Текстовый файл | ||
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| 461 | 1 | |t European Physical Journal Plus |c New York |n Springer Science+Business Media LLC. | |
| 463 | 1 | |t Vol. 140 |v Article number 1031, 9 p. |d 2025 | |
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| 701 | 1 | |a Ivanova |b A. I. |c physicist |c Associate Scientist of Tomsk Polytechnic University |f 1987- |g Anna Ivanovna |9 20002 | |
| 701 | 1 | |a Korneva |b O. S. |c physicist |c engineer of Tomsk Polytechnic University |f 1988- |g Olga Sergeevna |9 20156 | |
| 701 | 1 | |a Bozhko |b I. A. |c physicist |c Associate Professor of Tomsk Polytechnic University, Candidate of physical and mathematical sciences |f 1980- |g Irina Aleksandrovna |9 17740 | |
| 701 | 1 | |a Dektyarev |b S. V. |c physicist |c design engineer of Tomsk Polytechnic University |f 1957- |g Sergey Valentinovich |9 18833 | |
| 701 | 1 | |a Gurulev |b A. V. |c physicist |c Engineer of Tomsk Polytechnic University |f 1998- |g Aleksandr Valerjevich |9 88686 | |
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