Study on Optical and Photocatalytic Properties of Titanium Oxide Thin Films with Various Oxidation Degrees; Technical Physics Letters; Vol. 48, iss. 11
| Parent link: | Technical Physics Letters=Письма в журнал технической физики.— .— New York: Springer Science+Business Media LLC. Vol. 48, iss. 11.— 2022.— P. 297-300 |
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| Muut tekijät: | , , , , , |
| Yhteenveto: | The article presents the results of studies of the optical and photocatalytic properties of titanium oxide thin films deposited by cathodic arc deposition in an oxygen-containing atmosphere. It has been shown that thin films with various oxidation degrees are deposited depending on the oxygen flow rate into the operating chamber. Study of the obtained films has shown that the films obtained in the transition mode between the deposition of Ti metal films and TiO2 dielectric films have the maximum photocatalytic activity. This deposition mode is observed when the oxygen flow rate into the operating chamber is from 9 to 12 cm3/min Текстовый файл AM_Agreement |
| Kieli: | englanti |
| Julkaistu: |
2022
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| Aiheet: | |
| Linkit: | https://doi.org/10.1134/S1063785022100054 Статья на русском языке |
| Aineistotyyppi: | Elektroninen Kirjan osa |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=680208 |
| Yhteenveto: | The article presents the results of studies of the optical and photocatalytic properties of titanium oxide thin films deposited by cathodic arc deposition in an oxygen-containing atmosphere. It has been shown that thin films with various oxidation degrees are deposited depending on the oxygen flow rate into the operating chamber. Study of the obtained films has shown that the films obtained in the transition mode between the deposition of Ti metal films and TiO2 dielectric films have the maximum photocatalytic activity. This deposition mode is observed when the oxygen flow rate into the operating chamber is from 9 to 12 cm3/min Текстовый файл AM_Agreement |
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| DOI: | 10.1134/S1063785022100054 |