Study on Optical and Photocatalytic Properties of Titanium Oxide Thin Films with Various Oxidation Degrees; Technical Physics Letters; Vol. 48, iss. 11

Bibliographic Details
Parent link:Technical Physics Letters=Письма в журнал технической физики.— .— New York: Springer Science+Business Media LLC.
Vol. 48, iss. 11.— 2022.— P. 297-300
Other Authors: Ruchkin S. E. Sergey Evgenjevich, Zhidik Yu. S. Yury Sergeevich, Yuriev Yu. N. Yuri Nikolaevich, Runts A. A. Artem Alekseevich, Goncharova E. Ekaterina, Yuryeva A. V. Alena Victorovna
Summary:The article presents the results of studies of the optical and photocatalytic properties of titanium oxide thin films deposited by cathodic arc deposition in an oxygen-containing atmosphere. It has been shown that thin films with various oxidation degrees are deposited depending on the oxygen flow rate into the operating chamber. Study of the obtained films has shown that the films obtained in the transition mode between the deposition of Ti metal films and TiO2 dielectric films have the maximum photocatalytic activity. This deposition mode is observed when the oxygen flow rate into the operating chamber is from 9 to 12 cm3/min
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Language:English
Published: 2022
Subjects:
Online Access:https://doi.org/10.1134/S1063785022100054
Статья на русском языке
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=680208