Numerical Simulation of Thermal Processes and the Effect of Heating of Near-Surface Layers of Titanium on the Diffusion Transfer of Dopants during High-Intensity Pulsed Ion Implantation
| Parent link: | Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques.— .— New York: Springer Science+Business Media LLC. Vol. 17, iss. 6.— 2023.— P. 1458–1462 |
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| 要約: | Title screen Methods for modifying surface and near-surface layers of materials and coatings by ion beams have prospects for application in many fields of science and technology. The method of high-intensity implantation by high-power density ion beams with submillisecond duration involves significant pulsed heating of the near-surface layer of irradiated target, followed by its rapid cooling. This occurs due to heat removal into the material due to thermal conductivity and repetitively pulsed radiation-enhanced diffusion of atoms to depths that are much greater than the projective ion range. The paper considers the features of thermal processes and the effect of pulsed heating of near-surface titanium layers on diffusion transfer under conditions of synergy of high-intensity implantation of titanium ions and the energy impact of a repetitively-pulsed beam of high-power density on the surface in order to increase the depth of ion doping due to radiation-enhanced diffusion under conditions limited heating of the entire sample. The data of numerical simulation of dynamic changes in temperature fields in titanium and titanium self-diffusion under the action of ion beams with a submillisecond duration and a pulse power of tens of kW/cm2 and fluence of ions in a pulse 1.25 × 1015 ion/cm2 are presented Текстовый файл AM_Agreement |
| 言語: | 英語 |
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2023
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| オンライン･アクセス: | https://doi.org/10.1134/S1027451023060289 |
| フォーマット: | 電子媒体 図書の章 |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=680055 |