Numerical Simulation of Thermal Processes and Influence of Heating Surface Layers of Silicon on the Titanium Accumulation and Diffusion During High-Intensity Pulse Ion Implantation

Bibliographic Details
Parent link:	Energy Fluxes and Radiation Effects (EFRE-2024): Abstracts of 9th International Congress, Tomsk, September 16-21, 2024. P. 322.— .— Tomsk: Academizdat Publishing, 2024.— https://efre.ru/abstracts?ysclid=m3zkkvf041603477442
Main Author:	Ivanova A. I. Anna Ivanovna
Other Authors:	Bleykher (Bleicher) G. A. Galina Alekseevna, Zaytsev Daniil Dmitrievich D. D.
Summary:	Текстовый файл
Published:	2024
Subjects:	электронный ресурс труды учёных ТПУ
Online Access:	https://efre.ru/download/EFRE-2024-Abstracts.pdf#page=322 Статья на русском языке
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=678377

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