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|a Study of Regularities of Titanium Accumulation and Diffusion in Silicon During Repetitively-Pulsed Implantation with a High-Intense Ion Beam
|d Исследование закономерностей накопления и диффузии титана в кремнии при импульсно-периодической имплантации высокоинтенсивным пучком ионов
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|a Текстовый файл
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|t Energy Fluxes and Radiation Effects (EFRE-2024)
|o Abstracts of 9th International Congress, Tomsk, September 16-21, 2024
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|n Academizdat Publishing
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|v P. 321
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|u https://efre.ru/download/EFRE-2024-Abstracts.pdf#page=321
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|u https://hcei.tsc.ru/files/ru/nauka/conference/efre-2024/C3-P-032803.pdf
|z Статья на русском языке
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