Study of Regularities of Titanium Accumulation and Diffusion in Silicon During Repetitively-Pulsed Implantation with a High-Intense Ion Beam
| Parent link: | Energy Fluxes and Radiation Effects (EFRE-2024).— 2024.— P. 321 |
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| Other Authors: | , , , , |
| Summary: | Текстовый файл |
| Language: | English |
| Published: |
2024
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| Subjects: | |
| Online Access: | https://efre.ru/download/EFRE-2024-Abstracts.pdf#page=321 Статья на русском языке |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=678365 |