Ion emission from the plasma formed in the ferroelectric active source

Ion emission from the plasma formed in the ferroelectric active source

Bibliografiske detaljer
Parent link:	Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.— .— Amsterdam: Elsevier Science Publishing Company Inc. Vol. 1062.— 2024.— Article number 169223, 7 p.
Institution som forfatter:	National Research Tomsk Polytechnic University (570)
Andre forfattere:	Stepanov A. V. Andrey Vladimirovich, Konusov F. V. Fedor Valerievich, Pavlov S. K. Sergey Konstantinovich, Tarbokov V. A. Vladislav Aleksandrovich, Serebrennikov M. A. Maksim Anatolevich
Summary:	Title screen The experimental studies of active plasma source are presented. The plasma was formed by an incomplete discharge on the surface of ferroelectric BaTiO3 samples. The spectrum of the discharge was received using the optical emission spectroscopy method. The spectrum lines corresponded to the atoms and ions of elements related to the ferroelectric (Ba, Ti, O) and residual gas (N). The intensity of the spectrum lines depended on the discharge current and varied slightly depending on the residual gas in the pressure range of 10−5-10−3 Torr. An increase in the gas pressure results in the slight increase in the electron temperature of excited atoms of the discharge plasma. The ion emission in a plasma source at a negative bias voltage has been studied. Текстовый файл AM_Agreement
Sprog:	engelsk
Udgivet:	2024
Fag:	электронный ресурс труды учёных ТПУ Active plasma source Ion source Ferroelectric Plasma diagnostic Optical emission spectroscopy
Online adgang:	https://doi.org/10.1016/j.nima.2024.169223
Format:	Electronisk Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=673507

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