Ion emission from the plasma formed in the ferroelectric active source
| Parent link: | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.— .— Amsterdam: Elsevier Science Publishing Company Inc. Vol. 1062.— 2024.— Article number 169223, 7 p. |
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| Other Authors: | , , , , |
| Summary: | Title screen The experimental studies of active plasma source are presented. The plasma was formed by an incomplete discharge on the surface of ferroelectric BaTiO3 samples. The spectrum of the discharge was received using the optical emission spectroscopy method. The spectrum lines corresponded to the atoms and ions of elements related to the ferroelectric (Ba, Ti, O) and residual gas (N). The intensity of the spectrum lines depended on the discharge current and varied slightly depending on the residual gas in the pressure range of 10−5-10−3 Torr. An increase in the gas pressure results in the slight increase in the electron temperature of excited atoms of the discharge plasma. The ion emission in a plasma source at a negative bias voltage has been studied. Текстовый файл AM_Agreement |
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2024
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| Online Access: | https://doi.org/10.1016/j.nima.2024.169223 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=673507 |