Ion emission from the plasma formed in the ferroelectric active source; Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment; Vol. 1062
| Источник: | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.— .— Amsterdam: Elsevier Science Publishing Company Inc. Vol. 1062.— 2024.— Article number 169223, 7 p. |
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| Автор-организация: | |
| Другие авторы: | , , , , |
| Примечания: | Title screen The experimental studies of active plasma source are presented. The plasma was formed by an incomplete discharge on the surface of ferroelectric BaTiO3 samples. The spectrum of the discharge was received using the optical emission spectroscopy method. The spectrum lines corresponded to the atoms and ions of elements related to the ferroelectric (Ba, Ti, O) and residual gas (N). The intensity of the spectrum lines depended on the discharge current and varied slightly depending on the residual gas in the pressure range of 10−5-10−3 Torr. An increase in the gas pressure results in the slight increase in the electron temperature of excited atoms of the discharge plasma. The ion emission in a plasma source at a negative bias voltage has been studied. Текстовый файл AM_Agreement |
| Язык: | английский |
| Опубликовано: |
2024
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| Предметы: | |
| Online-ссылка: | https://doi.org/10.1016/j.nima.2024.169223 |
| Формат: | Электронный ресурс Статья |
| Запись в KOHA: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=673507 |
MARC
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| 200 | 1 | |a Ion emission from the plasma formed in the ferroelectric active source |f A. V. Stepanov, F. V. Konusov, S. K. Pavlov [et al.] | |
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| 330 | |a The experimental studies of active plasma source are presented. The plasma was formed by an incomplete discharge on the surface of ferroelectric BaTiO3 samples. The spectrum of the discharge was received using the optical emission spectroscopy method. The spectrum lines corresponded to the atoms and ions of elements related to the ferroelectric (Ba, Ti, O) and residual gas (N). The intensity of the spectrum lines depended on the discharge current and varied slightly depending on the residual gas in the pressure range of 10−5-10−3 Torr. An increase in the gas pressure results in the slight increase in the electron temperature of excited atoms of the discharge plasma. The ion emission in a plasma source at a negative bias voltage has been studied. | ||
| 336 | |a Текстовый файл | ||
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| 461 | 1 | |t Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment |c Amsterdam |n Elsevier Science Publishing Company Inc. | |
| 463 | 1 | |t Vol. 1062 |v Article number 169223, 7 p. |d 2024 | |
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a Active plasma source | |
| 610 | 1 | |a Ion source | |
| 610 | 1 | |a Ferroelectric | |
| 610 | 1 | |a Plasma diagnostic | |
| 610 | 1 | |a Optical emission spectroscopy | |
| 701 | 1 | |a Stepanov |b A. V. |c physicist |c Researcher of Tomsk Polytechnic University |f 1981- |g Andrey Vladimirovich |9 16076 | |
| 701 | 1 | |a Konusov |b F. V. |c physicist |c Lead Engineer of Tomsk Polytechnic University, Candidate of physical and mathematical sciences |f 1958- |g Fedor Valerievich |y Tomsk |9 16491 | |
| 701 | 1 | |a Pavlov |b S. K. |c physicist |c Engineer of Tomsk Polytechnic University |f 1990- |g Sergey Konstantinovich |9 16723 | |
| 701 | 1 | |a Tarbokov |b V. A. |c specialist in the field of material science |c Leading engineer of Tomsk Polytechnic University, Candidate of technical sciences |f 1969- |g Vladislav Aleksandrovich |9 21445 | |
| 701 | 1 | |a Serebrennikov |b M. A. |c Physicist |c Engineer of Tomsk Polytechnic University |f 1995- |g Maksim Anatolevich |9 21614 | |
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