Моделирование магнитной подсистемы планарного магнетрона
| Parent link: | Курзина, И. А. (химик ; 1972-). Перспективы развития фундаментальных наук=Prospects of Fundamental Sciences Development: сборник научных трудов XX Международной конференции студентов, аспирантов и молодых ученых, г. Томск, 25-28 апреля 2023 г..— .— Томск: Изд-во ТПУ, 2023 Т. 1 : Физика.— 2023.— С. 168-170 |
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| Summary: | Заглавие с экрана Magnetron sputtering systems are commonly used to change the functional properties of materials by applying thin-film coatings. In this work, we have simulated the magnetic field of the magnetic subsystem of a planar magnetron magnetron sputtering system in a 17 mm above target in increments of 1 cm by z-component using the Wolfram Mathematica 13.1 and Elcut. The dependence of the magnetic field on the distance from the target is provided and discussed. The simulation results, over a range of considered distances, are in good agreement with an experimental study. The developed module can be used for designing a magnetron system based on the created model Текстовый файл |
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2023
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| Online Access: | http://earchive.tpu.ru/handle/11683/80798 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=672725 |