Magnetron Sputtering Deposition of Intermetallic Coatings Using Tin and Niobium Plasma; Russian Physics Journal; Vol. 65, iss. 11
| Parent link: | Russian Physics Journal Vol. 65, iss. 11.— 2023.— [P. 2004-2009] |
|---|---|
| Autores corporativos: | , |
| Outros Autores: | , , , , |
| Resumo: | Title screen The paper studies the formation mechanisms of niobium (Nb) – tin (Sn) coatings during the magnetron sputtering deposition. The coatings are obtained both by layer-by-layer and simultaneous sputtering of Nb and Sn targets. The optimum operation mode is determined for the magnetron to provide the tin surface concentration of 19?26 at.%. The elemental composition and microstructure of the obtained coatings are studied in this paper. The structure and phase composition are investigated after 800°C annealing in a high-vacuum furnace. Research results indicate to the formation of the intermetallic compound triniobium tin. From the viewpoint of expected superconducting properties, the best results are obtained by a simultaneous use of two plasma sources. Режим доступа: по договору с организацией-держателем ресурса |
| Idioma: | inglês |
| Publicado em: |
2023
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| Assuntos: | |
| Acesso em linha: | https://doi.org/10.1007/s11182-023-02862-y |
| Formato: | Recurso Eletrônico Capítulo de Livro |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=669317 |
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| 200 | 1 | |a Magnetron Sputtering Deposition of Intermetallic Coatings Using Tin and Niobium Plasma |d Формирование интерметаллидных покрытий при использовании плазмы олова и ниобия методом магнетронного напыления |f Yu. N. Yuriev, A. E. Kharisova, T. V. Selezneva [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 17 tit.] | ||
| 330 | |a The paper studies the formation mechanisms of niobium (Nb) – tin (Sn) coatings during the magnetron sputtering deposition. The coatings are obtained both by layer-by-layer and simultaneous sputtering of Nb and Sn targets. The optimum operation mode is determined for the magnetron to provide the tin surface concentration of 19?26 at.%. The elemental composition and microstructure of the obtained coatings are studied in this paper. The structure and phase composition are investigated after 800°C annealing in a high-vacuum furnace. Research results indicate to the formation of the intermetallic compound triniobium tin. From the viewpoint of expected superconducting properties, the best results are obtained by a simultaneous use of two plasma sources. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Russian Physics Journal | ||
| 463 | |t Vol. 65, iss. 11 |v [P. 2004-2009] |d 2023 | ||
| 510 | 1 | |a Формирование интерметаллидных покрытий при использовании плазмы олова и ниобия методом магнетронного напыления |z rus | |
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a magnetron sputtering | |
| 610 | 1 | |a metal plasma | |
| 610 | 1 | |a niobium-tin | |
| 610 | 1 | |a superconductive coating | |
| 610 | 1 | |a high-temperature annealing | |
| 610 | 1 | |a магнетронное напыление | |
| 610 | 1 | |a плазма | |
| 610 | 1 | |a покрытия | |
| 610 | 1 | |a отжиг | |
| 701 | 1 | |a Yuriev |b Yu. N. |c specialist in the field of hydrogen energy |c Head of the laboratory of Tomsk Polytechnic University, Associate Scientist |f 1984- |g Yuri Nikolaevich |3 (RuTPU)RU\TPU\pers\31508 |9 15669 | |
| 701 | 1 | |a Kharisova |b A. E. |c nuclear technology specialist |c engineer of Tomsk Polytechnic University |f 1994- |g Anastasiya Evgenjevna |3 (RuTPU)RU\TPU\pers\46775 | |
| 701 | 1 | |a Selezneva |b T. V. |c physicist |c Engineer of Tomsk Polytechnic University |f 1998- |g Tatjyana Vyacheslavovna |3 (RuTPU)RU\TPU\pers\47539 | |
| 701 | 1 | |a Saveljev |b A. I. |g Aleksandr Igorevich | |
| 701 | 1 | |a Kazimirov |b A. I. |g Artyom Igorevich | |
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