Magnetron Sputtering Deposition of Intermetallic Coatings Using Tin and Niobium Plasma
Parent link: | Russian Physics Journal Vol. 65, iss. 11.— 2023.— [P. 2004-2009] |
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Інші автори: | , , , , |
Резюме: | Title screen The paper studies the formation mechanisms of niobium (Nb) – tin (Sn) coatings during the magnetron sputtering deposition. The coatings are obtained both by layer-by-layer and simultaneous sputtering of Nb and Sn targets. The optimum operation mode is determined for the magnetron to provide the tin surface concentration of 19?26 at.%. The elemental composition and microstructure of the obtained coatings are studied in this paper. The structure and phase composition are investigated after 800°C annealing in a high-vacuum furnace. Research results indicate to the formation of the intermetallic compound triniobium tin. From the viewpoint of expected superconducting properties, the best results are obtained by a simultaneous use of two plasma sources. Режим доступа: по договору с организацией-держателем ресурса |
Мова: | Англійська |
Опубліковано: |
2023
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Предмети: | |
Онлайн доступ: | https://doi.org/10.1007/s11182-023-02862-y |
Формат: | Електронний ресурс Частина з книги |
KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=669317 |