Magnetron Sputtering Deposition of Intermetallic Coatings Using Tin and Niobium Plasma; Russian Physics Journal; Vol. 65, iss. 11

Magnetron Sputtering Deposition of Intermetallic Coatings Using Tin and Niobium Plasma; Russian Physics Journal; Vol. 65, iss. 11

Bibliographische Detailangaben
Parent link:Russian Physics Journal
Vol. 65, iss. 11.— 2023.— [P. 2004-2009]
Körperschaften: Национальный исследовательский Томский политехнический университет Исследовательская школа физики высокоэнергетических процессов, Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Отделение экспериментальной физики
Weitere Verfasser: Yuriev Yu. N. Yuri Nikolaevich, Kharisova A. E. Anastasiya Evgenjevna, Selezneva T. V. Tatjyana Vyacheslavovna, Saveljev A. I. Aleksandr Igorevich, Kazimirov A. I. Artyom Igorevich
Zusammenfassung:Title screen
The paper studies the formation mechanisms of niobium (Nb) – tin (Sn) coatings during the magnetron sputtering deposition. The coatings are obtained both by layer-by-layer and simultaneous sputtering of Nb and Sn targets. The optimum operation mode is determined for the magnetron to provide the tin surface concentration of 19?26 at.%. The elemental composition and microstructure of the obtained coatings are studied in this paper. The structure and phase composition are investigated after 800°C annealing in a high-vacuum furnace. Research results indicate to the formation of the intermetallic compound triniobium tin. From the viewpoint of expected superconducting properties, the best results are obtained by a simultaneous use of two plasma sources.
Режим доступа: по договору с организацией-держателем ресурса
Sprache:Englisch
Veröffentlicht: 2023
Schlagworte:
электронный ресурс
труды учёных ТПУ
magnetron sputtering
metal plasma
niobium-tin
superconductive coating
high-temperature annealing
магнетронное напыление
плазма
покрытия
отжиг
Online-Zugang:https://doi.org/10.1007/s11182-023-02862-y
Format: Elektronisch Buchkapitel
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=669317
Beschreibung
Zusammenfassung:Title screen
The paper studies the formation mechanisms of niobium (Nb) – tin (Sn) coatings during the magnetron sputtering deposition. The coatings are obtained both by layer-by-layer and simultaneous sputtering of Nb and Sn targets. The optimum operation mode is determined for the magnetron to provide the tin surface concentration of 19?26 at.%. The elemental composition and microstructure of the obtained coatings are studied in this paper. The structure and phase composition are investigated after 800°C annealing in a high-vacuum furnace. Research results indicate to the formation of the intermetallic compound triniobium tin. From the viewpoint of expected superconducting properties, the best results are obtained by a simultaneous use of two plasma sources.
Режим доступа: по договору с организацией-держателем ресурса
DOI:10.1007/s11182-023-02862-y

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