Electrical Properties of Aluminum Oxide Ceramics Film on a Metal; Inorganic Materials: Applied Research; Vol. 12, iss. 5

Electrical Properties of Aluminum Oxide Ceramics Film on a Metal; Inorganic Materials: Applied Research; Vol. 12, iss. 5

Bibliographic Details
Parent link:Inorganic Materials: Applied Research
Vol. 12, iss. 5.— 2021.— [P. 1276-1280]
Corporate Author: Национальный исследовательский Томский политехнический университет Инженерная школа новых производственных технологий Отделение материаловедения
Other Authors: Bakeev I. Yu. Iljya Yurjevich, Burachevsky Yu. A. Yuriy Alexandrovich, Dvilis E. S. Edgar Sergeevich, Zolotukhin D. B. Denis Borisovich, Yushkov Y. G. Yuri Georgievich
Summary:Title screen
The work is devoted to the study of electrical properties (temperature dependences of conductivity, relative dielectric constant, dielectric loss tangent for various frequencies) of an aluminum oxide ceramic film deposited on a metal substrate. The film was created by an original method of electron beam evaporation of a nonconducting target consisting of a compressed alumina powder using a plasma electron source, which is able to reliably operate in the fore-vacuum pressure range (5–100 Pa). Such increased working gas pressure ensures the generation of a dense beam plasma near the target, which neutralizes the charging of a nonconducting target and thereby provides its effective melting and electron beam evaporation.
Режим доступа: по договору с организацией-держателем ресурса
Language:English
Published: 2021
Subjects:
электронный ресурс
труды учёных ТПУ
dielectric films
alumina ceramics
plasma
fore-vacuum pressure range
electron beam
диэлектрические пленки
глиноземное сырье
керамика
плазма
форвакуумная область давлений
электронные лучи
Online Access:https://doi.org/10.1134/S207511332105004X
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=668266

Similar Items

Similar Items