Radioactivation Monitoring of the Density of Wear-Resistant AlN and CrN Coatings on Silicon; Technical Physics Letters; Vol. 47, iss. 7
| Parent link: | Technical Physics Letters Vol. 47, iss. 7.— 2021.— [P. 524-527] |
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| Співавтори: | , |
| Інші автори: | , , , |
| Резюме: | Title screen A combination of two methods (nondestructive proton beam radioactivation analysis and optical microinterferometry) has been used for measuring the mass and linear thicknesses of AlN and CrN coatings deposited onto silicon substrates by means of magnetron sputtering. It is established that, at linear thickness from 2.2 to 5.7 μm, the density of deposits is close to that of bulk materials (3.26 g/cm3 for AlN and 5.9 g/cm3 for CrN), while the stoichiometry of nitrides can be controlled by varying the parameters of magnetron sputtering. The proposed method can also be used for determining the densities of metal carbide and oxide films used as wear-resistant coatings. Режим доступа: по договору с организацией-держателем ресурса |
| Мова: | Англійська |
| Опубліковано: |
2021
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| Предмети: | |
| Онлайн доступ: | https://doi.org/10.1134/S106378502105028X |
| Формат: | Електронний ресурс Частина з книги |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=667310 |