Special Aspects of High-Intensity Low-Energy Ion Implantation; Russian Physics Journal; Vol. 63, iss. 10
| Parent link: | Russian Physics Journal Vol. 63, iss. 10.— 2021.— [P. 1810-1819] |
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| Autor kompanije: | |
| Daljnji autori: | , , , |
| Sažetak: | Title screen Numerical simulations and experimental studies of surface and subsurface layers of different materials are performed in order to determine their real temperatures as a function of the regimes of high-intensity ion irradiation. The integral temperature of the target is measured using an electrically insulated thermocouple. A KLEIBER 740-LO high-temperature pulsed pyrometer is used to measure the dynamic variation of the local temperature. A contribution from the shock-wave mechanism into the mass transfer of the implanted impurity is studied during hot high-intensity ion implantation. Режим доступа: по договору с организацией-держателем ресурса |
| Jezik: | engleski |
| Izdano: |
2021
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| Teme: | |
| Online pristup: | https://doi.org/10.1007/s11182-021-02238-0 |
| Format: | Elektronički Poglavlje knjige |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=667064 |
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| 200 | 1 | |a Special Aspects of High-Intensity Low-Energy Ion Implantation |f A. I. Ryabchikov, A. I. Ivanova, O. S. Korneva, D. O. Sivin | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 25 tit.] | ||
| 330 | |a Numerical simulations and experimental studies of surface and subsurface layers of different materials are performed in order to determine their real temperatures as a function of the regimes of high-intensity ion irradiation. The integral temperature of the target is measured using an electrically insulated thermocouple. A KLEIBER 740-LO high-temperature pulsed pyrometer is used to measure the dynamic variation of the local temperature. A contribution from the shock-wave mechanism into the mass transfer of the implanted impurity is studied during hot high-intensity ion implantation. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Russian Physics Journal | ||
| 463 | |t Vol. 63, iss. 10 |v [P. 1810-1819] |d 2021 | ||
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a vacuum arc plasma | |
| 610 | 1 | |a ion beam of high pulsed power density | |
| 610 | 1 | |a ion implantation | |
| 610 | 1 | |a radiation stimulated diffusion | |
| 610 | 1 | |a deep ion alloying | |
| 610 | 1 | |a плазма | |
| 610 | 1 | |a вакуумная дуга | |
| 610 | 1 | |a ионные пучки | |
| 610 | 1 | |a ионная имплантация | |
| 701 | 1 | |a Ryabchikov |b A. I. |c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences |c physicist |f 1950- |g Aleksandr Ilyich |3 (RuTPU)RU\TPU\pers\30912 | |
| 701 | 1 | |a Ivanova |b A. I. |c physicist |c Associate Scientist of Tomsk Polytechnic University |f 1987- |g Anna Ivanovna |3 (RuTPU)RU\TPU\pers\36986 |9 20002 | |
| 701 | 1 | |a Korneva |b O. S. |c physicist |c engineer of Tomsk Polytechnic University |f 1988- |g Olga Sergeevna |3 (RuTPU)RU\TPU\pers\37178 |9 20156 | |
| 701 | 1 | |a Sivin |b D. O. |c physicist |c Senior researcher of Tomsk Polytechnic University, Candidate of technical sciences |f 1978- |g Denis Olegovich |3 (RuTPU)RU\TPU\pers\34240 | |
| 712 | 0 | 2 | |a Национальный исследовательский Томский политехнический университет |b Инженерная школа ядерных технологий |b Научная лаборатория высокоинтенсивной имплантации ионов |3 (RuTPU)RU\TPU\col\23698 |
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| 856 | 4 | 0 | |u https://doi.org/10.1007/s11182-021-02238-0 |
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