Special Aspects of High-Intensity Low-Energy Ion Implantation

Special Aspects of High-Intensity Low-Energy Ion Implantation

Bibliographic Details
Parent link:	Russian Physics Journal Vol. 63, iss. 10.— 2021.— [P. 1810-1819]
Corporate Author:	Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Научная лаборатория высокоинтенсивной имплантации ионов
Other Authors:	Ryabchikov A. I. Aleksandr Ilyich, Ivanova A. I. Anna Ivanovna, Korneva O. S. Olga Sergeevna, Sivin D. O. Denis Olegovich
Summary:	Title screen Numerical simulations and experimental studies of surface and subsurface layers of different materials are performed in order to determine their real temperatures as a function of the regimes of high-intensity ion irradiation. The integral temperature of the target is measured using an electrically insulated thermocouple. A KLEIBER 740-LO high-temperature pulsed pyrometer is used to measure the dynamic variation of the local temperature. A contribution from the shock-wave mechanism into the mass transfer of the implanted impurity is studied during hot high-intensity ion implantation. Режим доступа: по договору с организацией-держателем ресурса
Published:	2021
Subjects:	электронный ресурс труды учёных ТПУ vacuum arc plasma ion beam of high pulsed power density ion implantation radiation stimulated diffusion deep ion alloying плазма вакуумная дуга ионные пучки ионная имплантация
Online Access:	https://doi.org/10.1007/s11182-021-02238-0
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=667064

Internet

https://doi.org/10.1007/s11182-021-02238-0