Special Aspects of High-Intensity Low-Energy Ion Implantation; Russian Physics Journal; Vol. 63, iss. 10
| Parent link: | Russian Physics Journal Vol. 63, iss. 10.— 2021.— [P. 1810-1819] |
|---|---|
| Ente Autore: | |
| Altri autori: | , , , |
| Riassunto: | Title screen Numerical simulations and experimental studies of surface and subsurface layers of different materials are performed in order to determine their real temperatures as a function of the regimes of high-intensity ion irradiation. The integral temperature of the target is measured using an electrically insulated thermocouple. A KLEIBER 740-LO high-temperature pulsed pyrometer is used to measure the dynamic variation of the local temperature. A contribution from the shock-wave mechanism into the mass transfer of the implanted impurity is studied during hot high-intensity ion implantation. Режим доступа: по договору с организацией-держателем ресурса |
| Lingua: | inglese |
| Pubblicazione: |
2021
|
| Soggetti: | |
| Accesso online: | https://doi.org/10.1007/s11182-021-02238-0 |
| Natura: | Elettronico Capitolo di libro |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=667064 |