Deposition of Superhard Ti–C–N Plasma Coatings in Nitrogen Atmosphere

Bibliographic Details
Parent link:Inorganic Materials: Applied Research
Vol. 12, iss. 3.— 2021.— [P. 727-730]
Main Author: Gerasimov D. Yu. Dmitry Yurievich
Corporate Author: Национальный исследовательский Томский политехнический университет Инженерная школа энергетики Отделение электроэнергетики и электротехники
Other Authors: Sivkov A. A. Aleksandr Anatolyevich
Summary:Title screen
The possibility of manufacturing a superhard plasma coating based on titanium, nitrogen, and carbon on a metal substrate in a nitrogen atmosphere is shown. The coatings were deposited in one short-term accelerator operation cycle under the action of a hyperspeed jet of electroerosive Ti-containing plasma on the substrate surface. It is shown by SEM and XRD that nanostructured layers of titanium nitride and titanium carbonitride are formed, providing a high hardness of the coating. Plasma coatings deposited in a nitrogen atmosphere have a higher hardness (19.6 GPa) than coatings deposited in air (16.2 GPa), which is due to a higher content of nitride crystalline phases in the coating material. XRD data show that the coherent-scattering region of crystalline phases in coatings deposited in an atmosphere of air and in a nitrogen atmosphere is ~10–40 nm, which confirms the nanostructuring of all crystalline phases present in the coating.
Режим доступа: по договору с организацией-держателем ресурса
Published: 2021
Subjects:
Online Access:https://doi.org/10.1134/S2075113321030114
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=666400