High-rate grow of single crystal diamond in AC glow discharge plasma; Diamond and Related Materials; Vol. 120

High-rate grow of single crystal diamond in AC glow discharge plasma; Diamond and Related Materials; Vol. 120

Détails bibliographiques
Parent link:	Diamond and Related Materials Vol. 120.— 2021.— [108681, 7 p.]
Collectivités auteurs:	Национальный исследовательский Томский политехнический университет Инженерная школа новых производственных технологий Научно-производственная лаборатория "Импульсно-пучковых, электроразрядных и плазменных технологий", Национальный исследовательский Томский политехнический университет Исследовательская школа физики высокоэнергетических процессов, Национальный исследовательский Томский политехнический университет Инженерная школа новых производственных технологий Отделение материаловедения
Autres auteurs:	Linnik S. A. Stepan Andreevich, Zenkin S. P. Sergey Petrovich, Gaydaychuk A. V. Alexander Valerievich, Mitulinsky A. S. Aleksandr Sergeevich
Résumé:	Title screen The detailed experimental behavior of an AC abnormal glow discharge plasma assisted chemical vapor deposition reactor for single crystal diamond (SCD) synthesis operating within the wide-range (20–250 Torr) pressure regime was presented. Within the discharge operating window absorbed power densities of 250–9000 W/cm3 were achieved and high quality SCD synthesis with growth rate up to 80 ?m/h was demonstrated. At the power densities over 2500 W/cm3 the diamond substrates were located directly on water-cooled substrate holder without any intermediate molybdenum holder. The influence of several input experimental variables including pressure, N2 and Ar concentration, CH4 percentage, and discharge current on SCD deposition was explored. The quality of synthesized crystals approved competitive purity level of glow discharge CVD process. Режим доступа: по договору с организацией-держателем ресурса
Langue:	anglais
Publié:	2021
Sujets:	электронный ресурс труды учёных ТПУ single crystal diamond high-rate growth PACVD glow discharge монокристаллы алмазы рост тлеющие разряды плазма
Accès en ligne:	https://doi.org/10.1016/j.diamond.2021.108681
Format:	Électronique Chapitre de livre
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=666300

Documents similaires

The peculiarities of CVD diamond coatings synthesis in abnormal glow discharge plasma using repetitively-pulsed mode; Energy Fluxes and Radiation Effects (EFRE-2016)
par: Linnik S. A. Stepan Andreevich
Publié: (2016)

Highly selective deposition of CVD diamond on si wafers by using a combined technique of photolithography and ion etching; Energy Fluxes and Radiation Effects (EFRE-2016)
par: Okhotnikov V. V. Vitaly Vladimirovich
Publié: (2016)

Comparison of glow, arc, and magnetron direct current discharges; Resource-Efficient Technologies; No 2
par: Abrahamyan A. S.
Publié: (2019)

The peculiarities of structural modificaions of CVD polycrystalline diamond coatings by heavy doping with boron; Energy Fluxes and Radiation Effects (EFRE-2016)
par: Okhotnikov V. V. Vitaly Vladimirovich
Publié: (2016)

Angular distributions of parametric X-ray radiation from a diamond crystal; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 402
Publié: (2017)

Nitriding of commercial pure titanium in the plasma of frequency-pulsed non-selfsustained glow discharge with a hollow cathode at low pressure; High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes; Vol. 21, iss. 1
Publié: (2017)

Modelling of the diffusion saturation of metals and alloys in the glow discharge plasma inside a hollow cathode; Energy Fluxes and Radiation Effects (EFRE-2016)
par: Bao Hung Nguyen
Publié: (2016)

Lubricious behavior in CVD diamond/iron friction system at 25-700 ˚C; Materials Letters; Vol. 246
par: Zenkin S. P. Sergey Petrovich
Publié: (2019)

Согласование гипотезы электроразрядного образования кимберлитовых трубок с электроразрядным методом синтеза алмаза; Известия Томского политехнического университета [Известия ТПУ]; Т. 325, № 1 : Ресурсы планеты
par: Хазанович-Вульф К. К. Константин Константинович
Publié: (2014)

Tribological and mechanical properties of diamond films synthesized with high methane concentration; International Journal of Refractory Metals and Hard Materials; Vol. 85
par: Gaydaychuk A. V. Alexander Valerievich
Publié: (2019)

Synthesis of Ti21.5V40Cr38.5 alloy by abnormal glow discharge plasma; Materials Letters; Vol. 335
Publié: (2023)

Regularities of Misorientation in [111] FCC Single Crystals; AIP Conference Proceedings; Vol. 1909 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017 (AMHS’17)
par: Lychagin D. V. Dmitry Vasilievich
Publié: (2017)

Cyclic stability of the C36-type TiCr2 Laves phase synthesized in the abnormal glow discharge plasma under hydrogenation; International Journal of Hydrogen Energy; Vol. 44, iss. 13
Publié: (2019)

Creation and Accumulation of Radiation Defects in Single Crystals of Magnesium Oxide; Research Aims and Methodology
par: Surzhikov A. P. Anatoly Petrovich
Publié: (Cham, Springer Nature Switzerland AG, 2024)

Orientation dependence of subsurface deformation in dry sliding wear of Cu single crystals; Applied Surface Science; Vol. 274
par: Tarasov S. Yu. Sergei Yulievich
Publié: (2013)

Laser monitor for imaging single crystal diamond growth in H2-CH4 microwave plasma; Optics and Laser Technology; Vol. 120
Publié: (2019)

Octahedral slip in nickel single crystals induced by scratch testing; Письма о материалах; Т. 8, № 4 (32)
par: Alferova (Alfyorova) E. A. Ekaterina Aleksandrovna
Publié: (2018)

Periodic renucleation as an approach to improving the tribological properties of CVD diamond films; Tribology International; Vol. 200
Publié: (2024)

Pulsed X-Ray and Cathodoluminescence of Pure and Alloyed Zinc Selenide Single Crystals; Russian Physics Journal; Vol. 63, iss. 2
Publié: (2020)

Self-organization processes during deformation of nickel single crystals; Materials Characterization; Vol. 159
par: Alferova (Alfyorova) E. A. Ekaterina Aleksandrovna
Publié: (2020)

Analysis of Natural Diamonds by Rutherford Backscattering; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 13, iss. 4
Publié: (2019)

Dynamics of destruction of epoxy composites filled with ultra-dispersed diamond under impact conditions; Mechanics of Advanced Materials and Structures; Vol. 27, No. 9
Publié: (2020)

Crystallographic and Geometric Factors in the Shear Development in <001> FCC Single Crystals: Molecular Dynamics Simulation and Experimental Study; Crystals; Vol. 10, iss. 8
Publié: (2020)

Dry sliding of Hadfield steel single crystal oriented to deformation by slip and twinning: Deformation, wear, and acoustic emission characterization; Tribology International; Vol. 119
Publié: (2018)

Cu-Ir thin film alloy as a potential substrate for the heteroepitaxial diamond growth; Materials Letters; Vol. 321
Publié: (2022)

Macrosegmentation and strain hardening stages in copper single crystals under compression; International Journal of Plasticity; Vol. 69
Publié: (2015)

Nuclear Doping of Single-Crystal Silicon in the IRT-T Pool Type Research Nuclear Reactor; Actual Problems of Electronic Instrument Engineering (APEIE-2018); Vol. 1, pt. 1
Publié: (2018)

Subsurface structural evolution and wear lip formation on copper single crystals under unlubricated sliding conditions; Wear; Vol. 410-411
Publié: (2018)

Features of spectral dependence of single scattering characteristics for crystalline clouds; Journal of Quantitative Spectroscopy and Radiative Transfer; Vol. 251
par: Shefer O. V. Olga Vladimirovna
Publié: (2021)

On Tetrafluorobromates(III): Crystal Structures of the Dibromate CsBr2F7 and the Monobromate CsBrF4; Zeitschrift für anorganische und allgemeine Chemie (ZAAC); Vol. 639, iss. 15. Special Issue:Contributions dedicated to Professor Wolfgang Bensch on the Occasion of His 60th Birthday
Publié: (2013)

Evaporation and heat transfer of aqueous salt solutions during crystallization; Applied Thermal Engineering; Vol. 139
par: Misyura S. Ya. Sergey Yakovlevich
Publié: (2018)

Processes and parameters of diamond films deposition in AC glow discharge; Diamond and Related Materials; Vol. 32
par: Linnik S. A. Stepan Andreevich
Publié: (2013)

Radio frequency bias enhanced nucleation of CVD diamond; Materials Letters; Vol. 324
Publié: (2022)

Synthesis of Polycrystalline Diamond Films in Abnormal Glow Discharge and their Properties; Journal of Physics: Conference Series; Vol. 652 : Gas Discharge Plasmas and Their Applications (GDP 2015)
Publié: (2015)

Electrophysical properties of polycrystalline diamond films deposited from an abnormal glow discharge; IOP Conference Series: Materials Science and Engineering; Vol. 81 : Radiation-Thermal Effects and Processes in Inorganic Materials
Publié: (2015)

CVD synthesis of BN and BCN coatings using trimethylborate precursor; Energy Fluxes and Radiation Effects (EFRE-2016)
par: Linnik S. A. Stepan Andreevich
Publié: (2016)

Об агрегировании изоморфной примеси азота в синтетических алмазах (система Fe-Ni-C); Известия Томского политехнического университета [Известия ТПУ]. Инжиниринг георесурсов; Т. 333, № 10
par: Бабич Ю. В. Юрий Васильевич
Publié: (2022)

The Effect of Doping on the Electrophysical Properties of Polycrystalline Diamond Films Deposited from an Abnormal Glow Discharge; Journal of Physics: Conference Series; Vol. 652 : Gas Discharge Plasmas and Their Applications (GDP 2015)
Publié: (2015)

Color Centers in BaFBr Crystals: Experimental Study and Theoretical Modeling; Materials; Vol. 17, iss. 13
Publié: (2024)

Solid particle erosion of CVD diamond films deposited at different methane concentration; Wear; Vol. 494-495
Publié: (2022)