Stripping of carbon coatings in radio-frequency inductively coupled plasma of H2/Ar

Stripping of carbon coatings in radio-frequency inductively coupled plasma of H2/Ar

Detalles Bibliográficos
Parent link:Surface and Coatings Technology
Vol. 427.— 2021.— [127837, 9 p.]
Autores Corporativos: Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Научно-образовательный центр Б. П. Вейнберга, Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Отделение экспериментальной физики
Otros Autores: Sidelev D. V. Dmitry Vladimirovich, Ruchkin S. E. Sergey Evgenjevich, Yuriev Yu. N. Yuri Nikolaevich, Lomygin A. D. Anton Dmitrievich, Syrtanov M. S. Maksim Sergeevich, Stolbovskaya G. N. Galina Nikolaevna, Ukhanov S. Sergey
Sumario:Title screen
This article describes the stripping of amorphous carbon (a-C) coatings in an H2/Ar atmosphere using a radio-frequency inductively coupled plasma (RF-ICP) source. The power of the RF-ICP source, atmosphere composition (H2/Ar) and bias potential strongly affect the stripping rate (0.7-9.3 [mu]m/h), while the operating pressure has less influence (2.7-3.2 [mu]m/h). The selectivity of stripping of a-C and titanium coatings can be varied from 1 up to ~90 by changing the atmosphere composition. Chemical sputtering plays a key role in the productivity and selectivity of carbon stripping, it should have a higher rate compared to physical sputtering to enable high selectivity of coating stripping. Raman spectroscopy reveals the increase in graphitization degree and decreasing less ordered carbon of a-C coatings under stripping in H2/Ar plasma. Phase transformations of sublayer or substrate materials could occur under coating stripping in a reactive atmosphere in the example of hydride formation (TiH2-x) in a Ti sublayer.
Режим доступа: по договору с организацией-держателем ресурса
Lenguaje:inglés
Publicado: 2021
Materias:
электронный ресурс
труды учёных ТПУ
stripping
carbon coatings
hydrogen plasma
radio-frequency inductively-coupled plasma
углеродные покрытия
водородная плазма
аморфный углерод
удаление
Acceso en línea:https://doi.org/10.1016/j.surfcoat.2021.127837
Formato: Electrónico Capítulo de libro
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=665797

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