Stripping of carbon coatings in radio-frequency inductively coupled plasma of H2/Ar

Stripping of carbon coatings in radio-frequency inductively coupled plasma of H2/Ar

Bibliographic Details
Parent link:	Surface and Coatings Technology Vol. 427.— 2021.— [127837, 9 p.]
Corporate Authors:	Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Научно-образовательный центр Б. П. Вейнберга, Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Отделение экспериментальной физики
Other Authors:	Sidelev D. V. Dmitry Vladimirovich, Ruchkin S. E. Sergey Evgenjevich, Yuriev Yu. N. Yuri Nikolaevich, Lomygin A. D. Anton Dmitrievich, Syrtanov M. S. Maksim Sergeevich, Stolbovskaya G. N. Galina Nikolaevna, Ukhanov S. Sergey
Summary:	Title screen This article describes the stripping of amorphous carbon (a-C) coatings in an H2/Ar atmosphere using a radio-frequency inductively coupled plasma (RF-ICP) source. The power of the RF-ICP source, atmosphere composition (H2/Ar) and bias potential strongly affect the stripping rate (0.7-9.3 [mu]m/h), while the operating pressure has less influence (2.7-3.2 [mu]m/h). The selectivity of stripping of a-C and titanium coatings can be varied from 1 up to ~90 by changing the atmosphere composition. Chemical sputtering plays a key role in the productivity and selectivity of carbon stripping, it should have a higher rate compared to physical sputtering to enable high selectivity of coating stripping. Raman spectroscopy reveals the increase in graphitization degree and decreasing less ordered carbon of a-C coatings under stripping in H2/Ar plasma. Phase transformations of sublayer or substrate materials could occur under coating stripping in a reactive atmosphere in the example of hydride formation (TiH2-x) in a Ti sublayer. Режим доступа: по договору с организацией-держателем ресурса
Language:	English
Published:	2021
Subjects:	электронный ресурс труды учёных ТПУ stripping carbon coatings hydrogen plasma radio-frequency inductively-coupled plasma углеродные покрытия водородная плазма аморфный углерод удаление
Online Access:	https://doi.org/10.1016/j.surfcoat.2021.127837
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=665797

Internet

https://doi.org/10.1016/j.surfcoat.2021.127837