Formation and structural features of nitrogen-doped titanium dioxide thin films grown by reactive magnetron sputtering; Applied Surface Science; Vol. 534

Sonraí bibleagrafaíochta
Parent link:Applied Surface Science
Vol. 534.— 2020.— Article number 147572, 10 p.
Rannpháirtithe: Pustovalova A. A. Alla Aleksandrovna, Boytsova E. L. Elena Lvovna, Aubakirova D. Danagul, Bruns M. P. Michael, Tverdokhlebov S. I. Sergei Ivanovich, Pichugin V. F. Vladimir Fyodorovich
Achoimre:Title screen
The structural features of N-doped titanium dioxide (N-TiO2) thin films deposited via reactive magnetron sputtering system with different nitrogen to oxygen ratio are analyzed. Bias voltage was used as a significant parameter involved in the deposition process. Grown films have two-phase structure consisting of anatase and rutile mixture. The analysis of structure and morphology of the films by SEM, TEM, XRD, FTIR and XPS techniques showed the changing of anatase to rutile ratio and grain size reduction in N-TiO2 thin films with increase of nitrogen content in the working gas at simultaneous bias applying. Nitrogen atoms in oxide form are located at the crystallites boundaries and this 2D quasi-layer of NOx species limits the epitaxial growth of TiO2 crystallites during film formation
Текстовый файл
AM_Agreement
Teanga:Béarla
Foilsithe / Cruthaithe: 2020
Ábhair:
Rochtain ar líne:https://doi.org/10.1016/j.apsusc.2020.147572
Formáid: MixedMaterials Leictreonach Caibidil leabhair
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=663060

MARC

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330 |a The structural features of N-doped titanium dioxide (N-TiO2) thin films deposited via reactive magnetron sputtering system with different nitrogen to oxygen ratio are analyzed. Bias voltage was used as a significant parameter involved in the deposition process. Grown films have two-phase structure consisting of anatase and rutile mixture. The analysis of structure and morphology of the films by SEM, TEM, XRD, FTIR and XPS techniques showed the changing of anatase to rutile ratio and grain size reduction in N-TiO2 thin films with increase of nitrogen content in the working gas at simultaneous bias applying. Nitrogen atoms in oxide form are located at the crystallites boundaries and this 2D quasi-layer of NOx species limits the epitaxial growth of TiO2 crystallites during film formation 
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610 1 |a электронный ресурс 
610 1 |a труды учёных ТПУ 
610 1 |a titanium dioxide 
610 1 |a N-doped TiO2 
610 1 |a nitrogen oxides 
610 1 |a bias voltage 
610 1 |a magnetron sputtering 
610 1 |a оксид титана 
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