Electron-beam deposition of heat-conducting ceramic coatings in the forevacuum pressure range; Ceramics International; Vol. 46, iss. 13

Bibliografiske detaljer
Parent link:Ceramics International
Vol. 46, iss. 13.— 2020.— [P. 21190-21195]
Institution som forfatter: Национальный исследовательский Томский политехнический университет Инженерная школа энергетики Отделение электроэнергетики и электротехники
Andre forfattere: Yushkov Y. G. Yuri Georgievich, Oks E. M. Efim Mikhaylovich, Tyunkov A. V. Andrey Vladimirovich, Zolotukhin D. B. Denis Borisovich, Yushenko A. Yu., Yushkov A. Yu. Anatoly Yurievich
Summary:Title screen
We present experimental results on the deposition of multi-layer heat-conducting coatings of aluminum oxide and aluminum nitride on silicon substrates. We estimate the time dependencies of the temperature increase for an uncoated substrate and for similar samples covered by this kind of multi-layer coating. The composition of the coatings and their thermal properties have been investigated.
Режим доступа: по договору с организацией-держателем ресурса
Sprog:engelsk
Udgivet: 2020
Fag:
Online adgang:https://doi.org/10.1016/j.ceramint.2020.05.197
Format: Electronisk Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=662900

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