Electron-beam deposition of heat-conducting ceramic coatings in the forevacuum pressure range

Electron-beam deposition of heat-conducting ceramic coatings in the forevacuum pressure range

Bibliographic Details
Parent link:	Ceramics International Vol. 46, iss. 13.— 2020.— [P. 21190-21195]
Corporate Author:	Национальный исследовательский Томский политехнический университет Инженерная школа энергетики Отделение электроэнергетики и электротехники
Other Authors:	Yushkov Y. G. Yuri Georgievich, Oks E. M. Efim Mikhaylovich, Tyunkov A. V. Andrey Vladimirovich, Zolotukhin D. B. Denis Borisovich, Yushenko A. Yu., Yushkov A. Yu. Anatoly Yurievich
Summary:	Title screen We present experimental results on the deposition of multi-layer heat-conducting coatings of aluminum oxide and aluminum nitride on silicon substrates. We estimate the time dependencies of the temperature increase for an uncoated substrate and for similar samples covered by this kind of multi-layer coating. The composition of the coatings and their thermal properties have been investigated. Режим доступа: по договору с организацией-держателем ресурса
Published:	2020
Subjects:	электронный ресурс труды учёных ТПУ multi-component beam-produced plasma aluminum oxide ceramics aluminum nitride ceramics thermal conductivity of ceramics electron beam electron-beam vaporization mass-to-charge composition of plasma ions плазма керамика теплопроводность электронный луч электронно-лучевое испарение
Online Access:	https://doi.org/10.1016/j.ceramint.2020.05.197
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=662900

Internet

https://doi.org/10.1016/j.ceramint.2020.05.197