Electron-beam deposition of heat-conducting ceramic coatings in the forevacuum pressure range; Ceramics International; Vol. 46, iss. 13
| Parent link: | Ceramics International Vol. 46, iss. 13.— 2020.— [P. 21190-21195] |
|---|---|
| Erakunde egilea: | |
| Beste egile batzuk: | , , , , , |
| Gaia: | Title screen We present experimental results on the deposition of multi-layer heat-conducting coatings of aluminum oxide and aluminum nitride on silicon substrates. We estimate the time dependencies of the temperature increase for an uncoated substrate and for similar samples covered by this kind of multi-layer coating. The composition of the coatings and their thermal properties have been investigated. Режим доступа: по договору с организацией-держателем ресурса |
| Hizkuntza: | ingelesa |
| Argitaratua: |
2020
|
| Gaiak: | |
| Sarrera elektronikoa: | https://doi.org/10.1016/j.ceramint.2020.05.197 |
| Formatua: | Baliabide elektronikoa Liburu kapitulua |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=662900 |