Electron-beam deposition of heat-conducting ceramic coatings in the forevacuum pressure range
| Parent link: | Ceramics International Vol. 46, iss. 13.— 2020.— [P. 21190-21195] |
|---|---|
| Korporativní autor: | |
| Další autoři: | , , , , , |
| Shrnutí: | Title screen We present experimental results on the deposition of multi-layer heat-conducting coatings of aluminum oxide and aluminum nitride on silicon substrates. We estimate the time dependencies of the temperature increase for an uncoated substrate and for similar samples covered by this kind of multi-layer coating. The composition of the coatings and their thermal properties have been investigated. Режим доступа: по договору с организацией-держателем ресурса |
| Jazyk: | angličtina |
| Vydáno: |
2020
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| Témata: | |
| On-line přístup: | https://doi.org/10.1016/j.ceramint.2020.05.197 |
| Médium: | Elektronický zdroj Kapitola |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=662900 |
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| 200 | 1 | |a Electron-beam deposition of heat-conducting ceramic coatings in the forevacuum pressure range |f Y. G. Yushkov, E. M. Oks, A. V. Tyunkov [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 18 tit.] | ||
| 330 | |a We present experimental results on the deposition of multi-layer heat-conducting coatings of aluminum oxide and aluminum nitride on silicon substrates. We estimate the time dependencies of the temperature increase for an uncoated substrate and for similar samples covered by this kind of multi-layer coating. The composition of the coatings and their thermal properties have been investigated. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Ceramics International | ||
| 463 | |t Vol. 46, iss. 13 |v [P. 21190-21195] |d 2020 | ||
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a multi-component beam-produced plasma | |
| 610 | 1 | |a aluminum oxide ceramics | |
| 610 | 1 | |a aluminum nitride ceramics | |
| 610 | 1 | |a thermal conductivity of ceramics | |
| 610 | 1 | |a electron beam | |
| 610 | 1 | |a electron-beam vaporization | |
| 610 | 1 | |a mass-to-charge composition of plasma ions | |
| 610 | 1 | |a плазма | |
| 610 | 1 | |a керамика | |
| 610 | 1 | |a теплопроводность | |
| 610 | 1 | |a электронный луч | |
| 610 | 1 | |a электронно-лучевое испарение | |
| 701 | 1 | |a Yushkov |b Y. G. |c electrophysicist |c Professor of Tomsk Polytechnic University, Doctor of technical sciences |f 1937- |g Yuri Georgievich |3 (RuTPU)RU\TPU\pers\25936 |9 11786 | |
| 701 | 1 | |a Oks |b E. M. |g Efim Mikhaylovich | |
| 701 | 1 | |a Tyunkov |b A. V. |g Andrey Vladimirovich | |
| 701 | 1 | |a Zolotukhin |b D. B. |g Denis Borisovich | |
| 701 | 1 | |a Yushenko |b A. Yu. | |
| 701 | 1 | |a Yushkov |b A. Yu. |c specialist in the field of electricity |c associate Professor of Tomsk Polytechnic University, candidate of technical Sciences |f 1975- |g Anatoly Yurievich |3 (RuTPU)RU\TPU\pers\35549 |9 18730 | |
| 712 | 0 | 2 | |a Национальный исследовательский Томский политехнический университет |b Инженерная школа энергетики |b Отделение электроэнергетики и электротехники |3 (RuTPU)RU\TPU\col\23505 |9 28321 |
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