Electron-beam deposition of heat-conducting ceramic coatings in the forevacuum pressure range
| Parent link: | Ceramics International Vol. 46, iss. 13.— 2020.— [P. 21190-21195] |
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| Müşterek Yazar: | |
| Diğer Yazarlar: | , , , , , |
| Özet: | Title screen We present experimental results on the deposition of multi-layer heat-conducting coatings of aluminum oxide and aluminum nitride on silicon substrates. We estimate the time dependencies of the temperature increase for an uncoated substrate and for similar samples covered by this kind of multi-layer coating. The composition of the coatings and their thermal properties have been investigated. Режим доступа: по договору с организацией-держателем ресурса |
| Baskı/Yayın Bilgisi: |
2020
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| Konular: | |
| Online Erişim: | https://doi.org/10.1016/j.ceramint.2020.05.197 |
| Materyal Türü: | Elektronik Kitap Bölümü |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=662900 |
| Özet: | Title screen We present experimental results on the deposition of multi-layer heat-conducting coatings of aluminum oxide and aluminum nitride on silicon substrates. We estimate the time dependencies of the temperature increase for an uncoated substrate and for similar samples covered by this kind of multi-layer coating. The composition of the coatings and their thermal properties have been investigated. Режим доступа: по договору с организацией-держателем ресурса |
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| DOI: | 10.1016/j.ceramint.2020.05.197 |