Generation of boron ion beams by vacuum arc and planar magnetron ion sources; Review of Scientific Instruments; Vol. 90, iss. 10
| Parent link: | Review of Scientific Instruments Vol. 90, iss. 10.— 2019.— [103302, 4 p.] |
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| Ente Autore: | |
| Altri autori: | , , , , , , , , , , |
| Riassunto: | Title screen Boron ions can be implanted not only in semiconductors such as silicon wafers but also in other materials and metal products, e.g., machine parts and tools, to increase their surface properties and therefore lifetime. The purity of boron ion beams for these purposes is not so critical as for semiconductor technologies. Here, we present experimental results on the generation of pulsed boron ion beams in vacuum arc and planar magnetron ion sources with pure boron and lanthanum hexaboride cathodes with emphasis on the mass-charge state composition of the ion beams. Режим доступа: по договору с организацией-держателем ресурса |
| Lingua: | inglese |
| Pubblicazione: |
2019
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| Soggetti: | |
| Accesso online: | https://doi.org/10.1063/1.5125704 |
| Natura: | MixedMaterials Elettronico Capitolo di libro |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=662572 |
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| 200 | 1 | |a Generation of boron ion beams by vacuum arc and planar magnetron ion sources |f A. V. Bugaev, V. P. Frolova, V. I. Gushenets [et al.] | |
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| 300 | |a Title screen | ||
| 320 | |a [References: 20 tit.] | ||
| 330 | |a Boron ions can be implanted not only in semiconductors such as silicon wafers but also in other materials and metal products, e.g., machine parts and tools, to increase their surface properties and therefore lifetime. The purity of boron ion beams for these purposes is not so critical as for semiconductor technologies. Here, we present experimental results on the generation of pulsed boron ion beams in vacuum arc and planar magnetron ion sources with pure boron and lanthanum hexaboride cathodes with emphasis on the mass-charge state composition of the ion beams. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Review of Scientific Instruments | ||
| 463 | |t Vol. 90, iss. 10 |v [103302, 4 p.] |d 2019 | ||
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| 701 | 1 | |a Bugaev |b A. V. |g Aleksey Vladimirovich | |
| 701 | 1 | |a Frolova |b V. P. |g Valeriya Petrovna | |
| 701 | 1 | |a Gushenets |b V. I. |g Vasily Ivanovich | |
| 701 | 1 | |a Nikolaev |b A. G. |g Aleksey Gennadjevich | |
| 701 | 1 | |a Oks |b E. M. |g Efim Mikhaylovich | |
| 701 | 1 | |a Savkin |b K. P. |g Konstantin Petrovich | |
| 701 | 1 | |a Shandrikov |b M. V. |g Maksim Valentinovich | |
| 701 | 1 | |a Vizir |b A. |g Alexey | |
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