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|a Defect and ion distribution studies in ion-implanted silicon
|f K. Siemek [et al.]
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|t Slow Positron Beam Techniques and Applications (SLOPOS-15)
|o Book of Abstracts 15th International Workshop, Prague, September 2-6, 2019
|v [P. 89]
|d 2019
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|a электронный ресурс
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|f 1997-
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|a Национальный исследовательский Томский политехнический университет
|b Инженерная школа ядерных технологий
|b Отделение экспериментальной физики
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|u https://physics.mff.cuni.cz/kfnt/slopos/files/SLOPOS-15-book-of-abstracts.pdf#page=92
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