Effect of working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target; Journal of Physics: Conference Series; Vol. 1313 : 26th International Conference on Vacuum Technique and Technology
| Parent link: | Journal of Physics: Conference Series Vol. 1313 : 26th International Conference on Vacuum Technique and Technology.— 2019.— [012018, 4 р.] |
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| Zusammenfassung: | Title screen This study is dedicated to the influence of the inert working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target in Ar, Kr and Xe. The optical emission spectra of plasma, the elemental and phase composition of the formed coatings are investigated. The deposition rates of the CaP coatings formed in Ar and Kr are approximately comparable and higher than ones formed in Xe. |
| Sprache: | Englisch |
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2019
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| Online-Zugang: | https://doi.org/10.1088/1742-6596/1313/1/012018 |
| Format: | Elektronisch Buchkapitel |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=660990 |