Effect of working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target

Bibliographic Details
Parent link:	Journal of Physics: Conference Series Vol. 1313 : 26th International Conference on Vacuum Technique and Technology.— 2019.— [012018, 4 р.]
Main Author:	Fedotkin A. Yu. Aleksandr Yurjevich
Corporate Author:	Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Научно-образовательный центр Б. П. Вейнберга
Other Authors:	Kozelskaya A. I. Anna Ivanovna, Tverdokhlebov S. I. Sergei Ivanovich
Summary:	Title screen This study is dedicated to the influence of the inert working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target in Ar, Kr and Xe. The optical emission spectra of plasma, the elemental and phase composition of the formed coatings are investigated. The deposition rates of the CaP coatings formed in Ar and Kr are approximately comparable and higher than ones formed in Xe.
Published:	2019
Subjects:	электронный ресурс труды учёных ТПУ скорости осаждение рабочий газ
Online Access:	https://doi.org/10.1088/1742-6596/1313/1/012018
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=660990

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