Effect of working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target
| Parent link: | Journal of Physics: Conference Series Vol. 1313 : 26th International Conference on Vacuum Technique and Technology.— 2019.— [012018, 4 р.] |
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| Main Author: | |
| Corporate Author: | |
| Other Authors: | , |
| Summary: | Title screen This study is dedicated to the influence of the inert working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target in Ar, Kr and Xe. The optical emission spectra of plasma, the elemental and phase composition of the formed coatings are investigated. The deposition rates of the CaP coatings formed in Ar and Kr are approximately comparable and higher than ones formed in Xe. |
| Language: | English |
| Published: |
2019
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| Subjects: | |
| Online Access: | https://doi.org/10.1088/1742-6596/1313/1/012018 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=660990 |
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| 200 | 1 | |a Effect of working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target |f A. Yu. Fedotkin, A. I. Kozelskaya, S. I. Tverdokhlebov | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 7 tit.] | ||
| 330 | |a This study is dedicated to the influence of the inert working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target in Ar, Kr and Xe. The optical emission spectra of plasma, the elemental and phase composition of the formed coatings are investigated. The deposition rates of the CaP coatings formed in Ar and Kr are approximately comparable and higher than ones formed in Xe. | ||
| 461 | 0 | |0 (RuTPU)RU\TPU\network\3526 |t Journal of Physics: Conference Series | |
| 463 | |t Vol. 1313 : 26th International Conference on Vacuum Technique and Technology |o 18–20 June 2019, Saint Petersburg, Russian Federation |v [012018, 4 р.] |d 2019 | ||
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
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| 610 | 1 | |a осаждение | |
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| 700 | 1 | |a Fedotkin |b A. Yu. |c physicist |c engineer of Tomsk Polytechnic University |f 1994- |g Aleksandr Yurjevich |3 (RuTPU)RU\TPU\pers\44107 | |
| 701 | 1 | |a Kozelskaya |b A. I. |c physicist |c Researcher at Tomsk Polytechnic University, Candidate of Physical and Mathematical Sciences |f 1985- |g Anna Ivanovna |3 (RuTPU)RU\TPU\pers\39663 |9 21044 | |
| 701 | 1 | |a Tverdokhlebov |b S. I. |c physicist |c Associate Professor of Tomsk Polytechnic University, Candidate of physical and mathematical science |f 1961- |g Sergei Ivanovich |3 (RuTPU)RU\TPU\pers\30855 |9 15101 | |
| 712 | 0 | 2 | |a Национальный исследовательский Томский политехнический университет |b Инженерная школа ядерных технологий |b Научно-образовательный центр Б. П. Вейнберга |3 (RuTPU)RU\TPU\col\23561 |
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