Fedotkin A. Yu. Aleksandr Yurjevich, Kozelskaya A. I. Anna Ivanovna, & Tverdokhlebov S. I. Sergei Ivanovich. (2019). Effect of working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target; Journal of Physics: Conference Series; Vol. 1313 : 26th International Conference on Vacuum Technique and Technology. 2019. https://doi.org/10.1088/1742-6596/1313/1/012018
Chicago Style (17th ed.) CitationFedotkin A. Yu. Aleksandr Yurjevich, Kozelskaya A. I. Anna Ivanovna, and Tverdokhlebov S. I. Sergei Ivanovich. Effect of Working Gas on the Deposition Rate of CaP Coatings Formed by Radio Frequency Magnetron Sputtering of a Hydroxyapatite Target; Journal of Physics: Conference Series; Vol. 1313 : 26th International Conference on Vacuum Technique and Technology. 2019, 2019. https://doi.org/10.1088/1742-6596/1313/1/012018.
MLA (9th ed.) CitationFedotkin A. Yu. Aleksandr Yurjevich, et al. Effect of Working Gas on the Deposition Rate of CaP Coatings Formed by Radio Frequency Magnetron Sputtering of a Hydroxyapatite Target; Journal of Physics: Conference Series; Vol. 1313 : 26th International Conference on Vacuum Technique and Technology. 2019, 2019. https://doi.org/10.1088/1742-6596/1313/1/012018.