Effect of Short-Pulsed 200 keV C+ Ion Beam and 350 keV He{2+} Ion Beam Irradiation on Optical Properties of Al-Si-N Coatings with a Various Si Content

Effect of Short-Pulsed 200 keV C+ Ion Beam and 350 keV He{2+} Ion Beam Irradiation on Optical Properties of Al-Si-N Coatings with a Various Si Content

Dettagli Bibliografici
Parent link:	Surface Modification of Materials by Ion Beams (SMMIB-2019): 21st International Conference, 25-30 August 2019, Tomsk, Russia/ National Research Tomsk Polytechnic University (TPU). [P. 152].— , 2019
Enti autori:	Национальный исследовательский Томский политехнический университет Исследовательская школа физики высокоэнергетических процессов, Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Отделение экспериментальной физики, Национальный исследовательский Томский политехнический университет Инженерная школа новых производственных технологий Научно-производственная лаборатория "Импульсно-пучковых, электроразрядных и плазменных технологий"
Altri autori:	Pavlov S. K. Sergey Konstantinovich, Konusov F. V. Fedor Valerievich, Lauk A. L. Aleksandr Lukyanovich, Syrtanov M. S. Maksim Sergeevich, Karpov S. P. Semen Petrovich, Karpov V. B. Valeriy Borisovich, Gadirov R. Ruslan, Kashkarov E. B. Egor Borisovich, Tarbokov V. A. Vladislav Aleksandrovich, Musil Y. Yindrikh, Remnev G. E. Gennady Efimovich
Riassunto:	Заглавие с экрана
Lingua:	inglese
Pubblicazione:	2019
Serie:	Defect Engineering, Nano-Science and Technology. Poster Session
Soggetti:	электронный ресурс труды учёных ТПУ ion beam Al-Si-N coatings radiation defects absorption ионные пучки поглощение радиационные дефекты покрытия оптические свойства подложки магнетронное распыление
Accesso online:	https://smmib.ru/assets/files/SMMIB2019_TOMSK_full.pdf#page=153
Natura:	Elettronico Capitolo di libro
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=660895

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