Effect of Short-Pulsed 200 keV C+ Ion Beam and 350 keV He{2+} Ion Beam Irradiation on Optical Properties of Al-Si-N Coatings with a Various Si Content; Surface Modification of Materials by Ion Beams (SMMIB-2019)

Effect of Short-Pulsed 200 keV C+ Ion Beam and 350 keV He{2+} Ion Beam Irradiation on Optical Properties of Al-Si-N Coatings with a Various Si Content; Surface Modification of Materials by Ion Beams (SMMIB-2019)

Bibliografske podrobnosti
Parent link:	Surface Modification of Materials by Ion Beams (SMMIB-2019).— 2019.— [P. 152]
Corporate Authors:	Национальный исследовательский Томский политехнический университет Исследовательская школа физики высокоэнергетических процессов, Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Отделение экспериментальной физики, Национальный исследовательский Томский политехнический университет Инженерная школа новых производственных технологий Научно-производственная лаборатория "Импульсно-пучковых, электроразрядных и плазменных технологий"
Drugi avtorji:	Pavlov S. K. Sergey Konstantinovich, Konusov F. V. Fedor Valerievich, Lauk A. L. Aleksandr Lukyanovich, Syrtanov M. S. Maksim Sergeevich, Karpov S. P. Semen Petrovich, Karpov V. B. Valeriy Borisovich, Gadirov R. Ruslan, Kashkarov E. B. Egor Borisovich, Tarbokov V. A. Vladislav Aleksandrovich, Musil Y. Yindrikh, Remnev G. E. Gennady Efimovich
Izvleček:	Заглавие с экрана
Jezik:	angleščina
Izdano:	2019
Serija:	Defect Engineering, Nano-Science and Technology. Poster Session
Teme:	электронный ресурс труды учёных ТПУ ion beam Al-Si-N coatings radiation defects absorption ионные пучки поглощение радиационные дефекты покрытия оптические свойства подложки магнетронное распыление
Online dostop:	https://smmib.ru/assets/files/SMMIB2019_TOMSK_full.pdf#page=153
Format:	Elektronski Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=660895

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