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|a Effect of Short-Pulsed 200 keV C+ Ion Beam and 350 keV He{2+} Ion Beam Irradiation on Optical Properties of Al-Si-N Coatings with a Various Si Content
|f S. K. Pavlov et al.]
|
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|a Text
|c electronic
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| 225 |
1 |
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|a Defect Engineering, Nano-Science and Technology. Poster Session
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| 300 |
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|a Заглавие с экрана
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| 463 |
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0 |
|0 (RuTPU)RU\TPU\network\30793
|t Surface Modification of Materials by Ion Beams (SMMIB-2019)
|o 21st International Conference, 25-30 August 2019, Tomsk, Russia
|o abstract book
|f National Research Tomsk Polytechnic University (TPU)
|v [P. 152]
|d 2019
|
| 610 |
1 |
|
|a электронный ресурс
|
| 610 |
1 |
|
|a труды учёных ТПУ
|
| 610 |
1 |
|
|a ion beam
|
| 610 |
1 |
|
|a Al-Si-N coatings
|
| 610 |
1 |
|
|a radiation defects
|
| 610 |
1 |
|
|a absorption
|
| 610 |
1 |
|
|a ионные пучки
|
| 610 |
1 |
|
|a поглощение
|
| 610 |
1 |
|
|a радиационные дефекты
|
| 610 |
1 |
|
|a покрытия
|
| 610 |
1 |
|
|a оптические свойства
|
| 610 |
1 |
|
|a подложки
|
| 610 |
1 |
|
|a магнетронное распыление
|
| 701 |
|
1 |
|a Pavlov
|b S. K.
|c physicist
|c Engineer of Tomsk Polytechnic University
|f 1990-
|g Sergey Konstantinovich
|3 (RuTPU)RU\TPU\pers\32875
|
| 701 |
|
1 |
|a Konusov
|b F. V.
|c physicist
|c Lead Engineer of Tomsk Polytechnic University, Candidate of physical and mathematical sciences
|f 1958-
|g Fedor Valerievich
|y Tomsk
|3 (RuTPU)RU\TPU\pers\32570
|9 16491
|
| 701 |
|
1 |
|a Lauk
|b A. L.
|c Physicist
|c Leading engineer of Tomsk Polytechnic University
|f 1957-
|g Aleksandr Lukyanovich
|3 (RuTPU)RU\TPU\pers\37675
|9 20480
|
| 701 |
|
1 |
|a Syrtanov
|b M. S.
|c physicist
|c Associate Professor, Researcher of Tomsk Polytechnic University, Candidate of Technical Sciences
|f 1990-
|g Maksim Sergeevich
|3 (RuTPU)RU\TPU\pers\34764
|9 18114
|
| 701 |
|
1 |
|a Karpov
|b S. P.
|c Physicist
|c The Head of the Laboratory of Tomsk Polytechnic University
|f 1941-
|g Semen Petrovich
|3 (RuTPU)RU\TPU\pers\45021
|
| 701 |
|
1 |
|a Karpov
|b V. B.
|c Physicist
|c Engineer of Tomsk Polytechnic University
|f 1954-
|g Valeriy Borisovich
|3 (RuTPU)RU\TPU\pers\45019
|
| 701 |
|
1 |
|a Gadirov
|b R.
|g Ruslan
|
| 701 |
|
1 |
|a Kashkarov
|b E. B.
|c Physicist
|c Associate Professor, Researcher of Tomsk Polytechnic University, Candidate of Physical and Mathematical Sciences
|f 1991-
|g Egor Borisovich
|3 (RuTPU)RU\TPU\pers\34949
|9 18267
|
| 701 |
|
1 |
|a Tarbokov
|b V. A.
|c specialist in the field of material science
|c Leading engineer of Tomsk Polytechnic University, Candidate of technical sciences
|f 1969-
|g Vladislav Aleksandrovich
|3 (RuTPU)RU\TPU\pers\41878
|
| 701 |
|
1 |
|a Musil
|b Y.
|c physicist
|c Leading researcher of Tomsk Polytechnic University, Doctor of physical and mathematical sciences
|f 1934-
|g Yindrikh
|3 (RuTPU)RU\TPU\pers\36957
|
| 701 |
|
1 |
|a Remnev
|b G. E.
|c physicist
|c Professor of Tomsk Polytechnic University, Doctor of technical sciences
|f 1948-
|g Gennady Efimovich
|3 (RuTPU)RU\TPU\pers\31500
|
| 712 |
0 |
2 |
|a Национальный исследовательский Томский политехнический университет
|b Исследовательская школа физики высокоэнергетических процессов
|c (2017- )
|3 (RuTPU)RU\TPU\col\23551
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| 712 |
0 |
2 |
|a Национальный исследовательский Томский политехнический университет
|b Инженерная школа ядерных технологий
|b Отделение экспериментальной физики
|3 (RuTPU)RU\TPU\col\23549
|
| 712 |
0 |
2 |
|a Национальный исследовательский Томский политехнический университет
|b Инженерная школа новых производственных технологий
|b Научно-производственная лаборатория "Импульсно-пучковых, электроразрядных и плазменных технологий"
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|u https://smmib.ru/assets/files/SMMIB2019_TOMSK_full.pdf#page=153
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|c CF
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