Effect of Short-Pulsed 200 keV C+ Ion Beam and 350 keV He{2+} Ion Beam Irradiation on Optical Properties of Al-Si-N Coatings with a Various Si Content
| Parent link: | Surface Modification of Materials by Ion Beams (SMMIB-2019): 21st International Conference, 25-30 August 2019, Tomsk, Russia/ National Research Tomsk Polytechnic University (TPU). [P. 152].— , 2019 |
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| Collectivités auteurs: | , , |
| Autres auteurs: | , , , , , , , , , , |
| Résumé: | Заглавие с экрана |
| Publié: |
2019
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| Collection: | Defect Engineering, Nano-Science and Technology. Poster Session |
| Sujets: | |
| Accès en ligne: | https://smmib.ru/assets/files/SMMIB2019_TOMSK_full.pdf#page=153 |
| Format: | Électronique Chapitre de livre |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=660895 |
| Résumé: | Заглавие с экрана |
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