Effect of 28 MeV He{2+} Ion Beam and Short-Pulsed 200 keV C{+} Ion Beam Irradiation on Optical Properties of Multilayer Al-Si-N Coatings
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Effect of irradiation with continuous 28 MeV He2+ ion beam and short-pulsed 200 keV C+ ion beam on optical properties of multilayer Al-Si-N coatings
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Effect of Short-Pulsed 200 keV C+ Ion Beam and 350 keV He{2+} Ion Beam Irradiation on Optical Properties of Al-Si-N Coatings with a Various Si Content
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