|
|
|
|
| LEADER |
00000nla2a2200000 4500 |
| 001 |
660888 |
| 005 |
20260210071611.0 |
| 035 |
|
|
|a (RuTPU)RU\TPU\network\31001
|
| 035 |
|
|
|a RU\TPU\network\31000
|
| 090 |
|
|
|a 660888
|
| 100 |
|
|
|a 20191105a2019 k y0engy50 ba
|
| 101 |
0 |
|
|a eng
|
| 102 |
|
|
|a RU
|
| 105 |
|
|
|a y z 100zy
|
| 135 |
|
|
|a drgn ---uucaa
|
| 181 |
|
0 |
|a i
|
| 182 |
|
0 |
|a b
|
| 200 |
1 |
|
|a Controlling the Properties of Metal Films Deposited Using Magnetron Sputtering Systems with Evaporative Targets
|f G. A. Bleykher [et al.]
|
| 203 |
|
|
|a Text
|c electronic
|
| 225 |
1 |
|
|a Ion-Assisted Coating Deposition. Poster Session
|
| 300 |
|
|
|a Заглавие с экрана
|
| 463 |
|
0 |
|0 (RuTPU)RU\TPU\network\30793
|t Surface Modification of Materials by Ion Beams (SMMIB-2019)
|o 21st International Conference, 25-30 August 2019, Tomsk, Russia
|o abstract book
|f National Research Tomsk Polytechnic University (TPU)
|v [P. 106]
|d 2019
|
| 610 |
1 |
|
|a электронный ресурс
|
| 610 |
1 |
|
|a труды учёных ТПУ
|
| 610 |
1 |
|
|a металлические пленки
|
| 610 |
1 |
|
|a осаждение
|
| 610 |
1 |
|
|a магнетронные системы
|
| 610 |
1 |
|
|a распылительные системы
|
| 610 |
1 |
|
|a мишени
|
| 610 |
1 |
|
|a magnetron sputtering systems
|
| 610 |
1 |
|
|a metal films and coatings
|
| 610 |
1 |
|
|a sputtering
|
| 610 |
1 |
|
|a evaporation
|
| 610 |
1 |
|
|a film growth
|
| 701 |
|
1 |
|a Bleykher (Bleicher)
|b G. A.
|c physicist
|c Professor of Tomsk Polytechnic University, Doctor of Physical and Mathematical Sciences
|f 1961-
|g Galina Alekseevna
|3 (RuTPU)RU\TPU\pers\31496
|9 15657
|
| 701 |
|
1 |
|a Yuryeva
|b A. V.
|c specialist in the field of hydrogen energy and plasma technologies
|c Associate Professor of Tomsk Polytechnic University, Candidate of Technical Sciences
|f 1983-
|g Alena Victorovna
|3 (RuTPU)RU\TPU\pers\33389
|9 17084
|
| 701 |
|
1 |
|a Sidelev
|b D. V.
|c physicist
|c Associate Professor of Tomsk Polytechnic University, Candidate of Technical Sciences
|f 1991-
|g Dmitry Vladimirovich
|y Tomsk
|3 (RuTPU)RU\TPU\pers\34524
|9 17905
|
| 701 |
|
1 |
|a Shabunin
|b A. S.
|c Physicist
|c Engineer of Tomsk Polytechnic University
|f 1987-
|g Artem Sergeevich
|3 (RuTPU)RU\TPU\pers\37139
|
| 701 |
|
1 |
|a Yuriev
|b Yu. N.
|c specialist in the field of hydrogen energy
|c Head of the laboratory of Tomsk Polytechnic University, Associate Scientist
|f 1984-
|g Yuri Nikolaevich
|3 (RuTPU)RU\TPU\pers\31508
|9 15669
|
| 712 |
0 |
2 |
|a Национальный исследовательский Томский политехнический университет
|b Инженерная школа ядерных технологий
|b Научно-образовательный центр Б. П. Вейнберга
|3 (RuTPU)RU\TPU\col\23561
|9 28358
|
| 801 |
|
2 |
|a RU
|b 63413507
|c 20191105
|g RCR
|
| 856 |
4 |
|
|u https://smmib.ru/assets/files/SMMIB2019_TOMSK_full.pdf#page=107
|
| 942 |
|
|
|c CF
|
