Formation of bioactive coatings by radio frequency magnetron sputtering using various calcium phosphate targets and working gases

Formation of bioactive coatings by radio frequency magnetron sputtering using various calcium phosphate targets and working gases

Bibliographic Details
Parent link:Journal of Physics: Conference Series
Vol. 1281 : 14th InternationalConference on Films and Coatings (ICFC14).— 2019.— [012016, 5 p.]
Main Author: Fedotkin A. Yu. Aleksandr Yurjevich
Corporate Author: Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Научно-образовательный центр Б. П. Вейнберга
Other Authors: Kozelskaya A. I. Anna Ivanovna, Tverdokhlebov S. I. Sergei Ivanovich
Summary:Title screen
The influence of working gas and the sputtered target composition on physico-chemical properties and the deposition rate of the coatings formed by radio frequency magnetron sputtering was studied. The deposition rate of the CaP coatings formed by sputtering of the HA target in Ar and Kr is greater than that of coatings formed in Xe. Strontium substitutions in the composition of β-tricalcium phosphate targets lead to the increase in deposition rate. Magnesium ones slightly decrease it.
Language:English
Published: 2019
Subjects:
электронный ресурс
труды учёных ТПУ
биоактивные покрытия
ВЧМP
высокочастотное магнетронное распыление
кальций-фосфатные мишени
рабочий газ
Online Access:https://doi.org/10.1088/1742-6596/1281/1/012016
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=660835

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