Formation of bioactive coatings by radio frequency magnetron sputtering using various calcium phosphate targets and working gases
| Parent link: | Journal of Physics: Conference Series Vol. 1281 : 14th InternationalConference on Films and Coatings (ICFC14).— 2019.— [012016, 5 p.] |
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| Summary: | Title screen The influence of working gas and the sputtered target composition on physico-chemical properties and the deposition rate of the coatings formed by radio frequency magnetron sputtering was studied. The deposition rate of the CaP coatings formed by sputtering of the HA target in Ar and Kr is greater than that of coatings formed in Xe. Strontium substitutions in the composition of β-tricalcium phosphate targets lead to the increase in deposition rate. Magnesium ones slightly decrease it. |
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2019
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| Online Access: | https://doi.org/10.1088/1742-6596/1281/1/012016 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=660835 |