Formation of bioactive coatings by radio frequency magnetron sputtering using various calcium phosphate targets and working gases; Journal of Physics: Conference Series; Vol. 1281 : 14th InternationalConference on Films and Coatings (ICFC14)
| Parent link: | Journal of Physics: Conference Series Vol. 1281 : 14th InternationalConference on Films and Coatings (ICFC14).— 2019.— [012016, 5 p.] |
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| Autor principal: | |
| Autor corporatiu: | |
| Altres autors: | , |
| Sumari: | Title screen The influence of working gas and the sputtered target composition on physico-chemical properties and the deposition rate of the coatings formed by radio frequency magnetron sputtering was studied. The deposition rate of the CaP coatings formed by sputtering of the HA target in Ar and Kr is greater than that of coatings formed in Xe. Strontium substitutions in the composition of β-tricalcium phosphate targets lead to the increase in deposition rate. Magnesium ones slightly decrease it. |
| Idioma: | anglès |
| Publicat: |
2019
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| Matèries: | |
| Accés en línia: | https://doi.org/10.1088/1742-6596/1281/1/012016 |
| Format: | MixedMaterials Electrònic Capítol de llibre |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=660835 |
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| 200 | 1 | |a Formation of bioactive coatings by radio frequency magnetron sputtering using various calcium phosphate targets and working gases |d Формирование биоактивных покрытий методом ВЧМР с использованием различных кальций-фосфатных мишеней рабочих газов |f A. Yu. Fedotkin, A. I. Kozelskaya, S. I. Tverdokhlebov | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 6 tit.] | ||
| 330 | |a The influence of working gas and the sputtered target composition on physico-chemical properties and the deposition rate of the coatings formed by radio frequency magnetron sputtering was studied. The deposition rate of the CaP coatings formed by sputtering of the HA target in Ar and Kr is greater than that of coatings formed in Xe. Strontium substitutions in the composition of β-tricalcium phosphate targets lead to the increase in deposition rate. Magnesium ones slightly decrease it. | ||
| 461 | 0 | |0 (RuTPU)RU\TPU\network\3526 |t Journal of Physics: Conference Series | |
| 463 | |t Vol. 1281 : 14th InternationalConference on Films and Coatings (ICFC14) |o 14–16 May 2019, Saint Petersburg, Russian Federation |v [012016, 5 p.] |l Пленки и покрытия - 2019 |o труды 14-й Международной конференции, 14-16 мая 2019 г.,Санкт-Петербург, Россия |d 2019 | ||
| 510 | 1 | |a Формирование биоактивных покрытий методом ВЧМР с использованием различных кальций-фосфатных мишеней рабочих газов |z rus | |
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a биоактивные покрытия | |
| 610 | 1 | |a ВЧМP | |
| 610 | 1 | |a высокочастотное магнетронное распыление | |
| 610 | 1 | |a кальций-фосфатные мишени | |
| 610 | 1 | |a рабочий газ | |
| 700 | 1 | |a Fedotkin |b A. Yu. |c physicist |c engineer of Tomsk Polytechnic University |f 1994- |g Aleksandr Yurjevich |3 (RuTPU)RU\TPU\pers\44107 | |
| 701 | 1 | |a Kozelskaya |b A. I. |c physicist |c Researcher at Tomsk Polytechnic University, Candidate of Physical and Mathematical Sciences |f 1985- |g Anna Ivanovna |3 (RuTPU)RU\TPU\pers\39663 |9 21044 | |
| 701 | 1 | |a Tverdokhlebov |b S. I. |c physicist |c Associate Professor of Tomsk Polytechnic University, Candidate of physical and mathematical science |f 1961- |g Sergei Ivanovich |3 (RuTPU)RU\TPU\pers\30855 |9 15101 | |
| 712 | 0 | 2 | |a Национальный исследовательский Томский политехнический университет |b Инженерная школа ядерных технологий |b Научно-образовательный центр Б. П. Вейнберга |3 (RuTPU)RU\TPU\col\23561 |
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| 856 | 4 | |u https://doi.org/10.1088/1742-6596/1281/1/012016 | |
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