Operation parameters of magnetron diode for high-rate deposition of aluminum films; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM)
| Parent link: | Journal of Physics: Conference Series Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM).— 2018.— [032020, 5 p.] |
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| Egile nagusia: | |
| Erakunde egilea: | |
| Beste egile batzuk: | |
| Gaia: | Title screen This article reports on the results of the detailed study of erosion of Al target in magnetron discharge plasma. It was demonstrated that the combination of middle-frequency (MF) and high impulse power (HiPIMS) power supply results in the significant increase of deposition rates of Al films by changing of sputtering yield. The MF pulse assists HiPIMS discharge to transit in a high power mode. |
| Hizkuntza: | ingelesa |
| Argitaratua: |
2018
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| Gaiak: | |
| Sarrera elektronikoa: | http://earchive.tpu.ru/handle/11683/57378 https://doi.org/10.1088/1742-6596/1115/3/032020 |
| Formatua: | Baliabide elektronikoa Liburu kapitulua |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=660038 |
MARC
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| 200 | 1 | |a Operation parameters of magnetron diode for high-rate deposition of aluminum films |f D. V. Sidelev, V. A. Grudinin | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 5 tit.] | ||
| 330 | |a This article reports on the results of the detailed study of erosion of Al target in magnetron discharge plasma. It was demonstrated that the combination of middle-frequency (MF) and high impulse power (HiPIMS) power supply results in the significant increase of deposition rates of Al films by changing of sputtering yield. The MF pulse assists HiPIMS discharge to transit in a high power mode. | ||
| 461 | 1 | |0 (RuTPU)RU\TPU\network\3526 |t Journal of Physics: Conference Series | |
| 463 | 1 | |t Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM) |o [proceedings], 16-22 September 2018, Tomsk, Russian Federation |d 2018 |v [032020, 5 p.] | |
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a магнетронный разряд | |
| 610 | 1 | |a плазма | |
| 610 | 1 | |a осаждение | |
| 610 | 1 | |a алюминиевые пленки | |
| 700 | 1 | |a Sidelev |b D. V. |c physicist |c Associate Professor of Tomsk Polytechnic University, Candidate of Technical Sciences |f 1991- |g Dmitry Vladimirovich |y Tomsk |3 (RuTPU)RU\TPU\pers\34524 |9 17905 | |
| 701 | 1 | |a Grudinin |b V. A. |c physicist |c engineer of Tomsk Polytechnic University |f 1995- |g Vladislav Alekseevich |3 (RuTPU)RU\TPU\pers\42519 |9 21548 | |
| 712 | 0 | 2 | |a Национальный исследовательский Томский политехнический университет |b Инженерная школа ядерных технологий |b Научно-образовательный центр Б. П. Вейнберга |3 (RuTPU)RU\TPU\col\23561 |
| 801 | 2 | |a RU |b 63413507 |c 20200121 |g RCR | |
| 856 | 4 | |u http://earchive.tpu.ru/handle/11683/57378 | |
| 856 | 4 | |u https://doi.org/10.1088/1742-6596/1115/3/032020 | |
| 942 | |c CF | ||