Sidelev D. V. Dmitry Vladimirovich & Grudinin V. A. Vladislav Alekseevich. (2018). Operation parameters of magnetron diode for high-rate deposition of aluminum films; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM). 2018. https://doi.org/10.1088/1742-6596/1115/3/032020
Chicago Style (17. basım) AtıfSidelev D. V. Dmitry Vladimirovich ve Grudinin V. A. Vladislav Alekseevich. Operation Parameters of Magnetron Diode for High-rate Deposition of Aluminum Films; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM). 2018, 2018. https://doi.org/10.1088/1742-6596/1115/3/032020.
MLA (9th ed.) AtıfSidelev D. V. Dmitry Vladimirovich ve Grudinin V. A. Vladislav Alekseevich. Operation Parameters of Magnetron Diode for High-rate Deposition of Aluminum Films; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM). 2018, 2018. https://doi.org/10.1088/1742-6596/1115/3/032020.