APA (7th ed.) Citation

Sidelev D. V. Dmitry Vladimirovich & Grudinin V. A. Vladislav Alekseevich. (2018). Operation parameters of magnetron diode for high-rate deposition of aluminum films. 2018. https://doi.org/10.1088/1742-6596/1115/3/032020

Chicago Style (17th ed.) Citation

Sidelev D. V. Dmitry Vladimirovich and Grudinin V. A. Vladislav Alekseevich. Operation Parameters of Magnetron Diode for High-rate Deposition of Aluminum Films. 2018, 2018. https://doi.org/10.1088/1742-6596/1115/3/032020.

MLA (9th ed.) Citation

Sidelev D. V. Dmitry Vladimirovich and Grudinin V. A. Vladislav Alekseevich. Operation Parameters of Magnetron Diode for High-rate Deposition of Aluminum Films. 2018, 2018. https://doi.org/10.1088/1742-6596/1115/3/032020.