Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM)

Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM)

Dades bibliogràfiques
Parent link:	Journal of Physics: Conference Series Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM).— 2018.— [032065, 6 p.]
Autor corporatiu:	Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Научно-образовательный центр Б. П. Вейнберга
Altres autors:	Bleykher (Bleicher) G. A. Galina Alekseevna, Sidelev D. V. Dmitry Vladimirovich, Grudinin V. A. Vladislav Alekseevich, Krivobokov V. P. Valery Pavlovich, Yuryeva A. V. Alena Victorovna
Sumari:	Title screen This article reports on the pecularities of Cr and Cu coatings deposited by magnetron sputtering with hot and evaporative targets. There is shown the role of heat radiation from hot (evaporative) target and sublimated particle flux in energy flux density on the substrate and deposition rates. The Cr and Cu films were investigated by X-ray diffraction, scanning electron microscopy, nanoindentation, electrical conductivity and corrosion tests.
Idioma:	anglès
Publicat:	2018
Matèries:	электронный ресурс труды учёных ТПУ магнетронное распыление тепловое излучение рентгеновская дифракция
Accés en línia:	https://doi.org/10.1088/1742-6596/1115/3/032065
Format:	MixedMaterials Electrònic Capítol de llibre
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=660019

Ítems similars

Deposition of calcium phosphate coatings using radio frequency magnetron sputtering of substituted β-tricalcium phosphate targets; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM)
Publicat: (2018)

The physico-chemical properties of electrospun vascular PLLA scaffolds modified by the DC magnetron sputtering of a titanium target; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM)
per: Marjin (Maryin) P. V. Pavel Vladimirovich
Publicat: (2018)

Magnetron sputtered LSC thin films for solid oxide fuel cell application; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects", EFRE2018. 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM)
Publicat: (2018)

Operation parameters of magnetron diode for high-rate deposition of aluminum films; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM)
per: Sidelev D. V. Dmitry Vladimirovich
Publicat: (2018)

Introduction of hydrogen into titanium by plasma methods; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM)
Publicat: (2018)

Optimization of the TiB2 plasma dynamic synthesis; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM)
Publicat: (2018)

Plasmadynamic synthesis in the Si-C-N-O system; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM)
Publicat: (2018)

Hypereutectic silumin modification by ion-electron-plasma method; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM)
Publicat: (2018)

Numerical simulation of high-intensity metal ion beam generation; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM)
Publicat: (2018)

Nitriding of steel 40x with a high-intensity ion beam; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM)
Publicat: (2018)

Modification of stainless steel by low-energy focused nitrogen ion beam; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM)
Publicat: (2018)

Ibuprofen controlled release from E-beam treated polycaprolactone electrospun scaffolds; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM)
Publicat: (2018)

Modification of 40X13 steel at high-intensity nitrogen ion implantation; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM)
Publicat: (2018)

Low-energy plasma-immersion implantation of nitrogen ions in titanium by a beam with ballistic focusing; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM)
Publicat: (2018)

Evaporation factor in productivity increase of hot target magnetron sputtering systems; Vacuum; Vol. 132
Publicat: (2016)

Formation of bioactive coatings by radio frequency magnetron sputtering using various calcium phosphate targets and working gases; Journal of Physics: Conference Series; Vol. 1281 : 14th InternationalConference on Films and Coatings (ICFC14)
per: Fedotkin A. Yu. Aleksandr Yurjevich
Publicat: (2019)

Microstructure and properties of Ti-6.5Al-3.5Mo-1.5Zr-0.3Si parts produced by electron beam melting; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects", EFRE2018. 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM)
Publicat: (2018)

Nanodefects in YAG: Ce phosphors; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 18th International Conference on Radiation Physics and Chemistry of Condensed Matter (18th RPC)
Publicat: (2018)

Investigation of the optical properties of unirradiated and irradiated sediments; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 18th International Conference on Radiation Physics and Chemistry of Condensed Matter (18th RPC)
Publicat: (2018)

International Joint Conference 16th International Conference on Computational Intelligence in Security for Information Systems (CISIS 2023) 14th International Conference on EUropean Transnational Education (ICEUTE 2023) Proceedings /
Publicat: (2023)

Methodologies and Intelligent Systems for Technology Enhanced Learning, 14th International Conference
Publicat: (2024)

Kinetics of cathodoluminescence of LiF crystals doped with uranium; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 18th International Conference on Radiation Physics and Chemistry of Condensed Matter (18th RPC)
Publicat: (2018)

YAG based phosphors, synthesized in a field of radiation; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 18th International Conference on Radiation Physics and Chemistry of Condensed Matter (18th RPC)
Publicat: (2018)

14th International Conference on Computational Intelligence in Security for Information Systems and 12th International Conference on European Transnational Educational (CISIS 2021 and ICEUTE 2021)
Publicat: (2022)

Effect of anomalous broadening in uniaxial stretching of thin polyethylene films; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 18th International Conference on Radiation Physics and Chemistry of Condensed Matter (18th RPC)
Publicat: (2018)

High-rate magnetron sputtering with hot target; Surface and Coatings Technology; Vol. 308 : The 43rd International Conference on Metallurgical Coatings and Thin Films
Publicat: (2016)

Proceedings of the 9th International Performance Analysis Workshop and Conference & 5th IACSS Conference
Publicat: (2022)

Luminescence decay kinetics of yttrium aluminium garnet phosphor at different temperature; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 18th International Conference on Radiation Physics and Chemistry of Condensed Matter (18th RPC)
Publicat: (2018)

Practical Applications of Computational Biology & Bioinformatics, 14th International Conference (PACBB 2020)
Publicat: (2021)

Methodologies and Intelligent Systems for Technology Enhanced Learning, Workshops - 14th International Conference
Publicat: (2025)

Angular thickness distribution and target utilization for hot Ni target magnetron sputtering; Vacuum; Vol. 160
per: Sidelev D. V. Dmitry Vladimirovich
Publicat: (2018)

Magnetron sputtering of hot silicon carbide target; Surface and Coatings Technology; Vol. 528
Publicat: (2026)

Plasma chemical purification of flue gases using pulsed electron beams; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 20th International Symposium on High-Current Electronics (20th SHCE)
per: Kholodnaya G. E. Galina Evgenievna
Publicat: (2018)

Extended Selected Papers of the 14th International Conference on Information, Intelligence, Systems, and Applications IISA2023 /
Publicat: (2024)

Proceedings of the 10th International Ergonomics Conference ERGONOMICS 2024 /
Publicat: (2025)

Proceedings of 14th International Conference on Electromechanics and Robotics “Zavalishin's Readings” ER(ZR) 2019, Kursk, Russia, 17 - 20 April 2019 /
Publicat: (2020)

14th International Conference on Theory and Application of Fuzzy Systems and Soft Computing – ICAFS-2020
Publicat: (2021)

Study of plasma formation in a planar type ion diode with self-magnetic isolation; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects"/ 20th International Symposium on High-Current Electronics (20th SHCE)
per: Stepanov A. V. Andrey Vladimirovich
Publicat: (2018)

Hot target magnetron sputtering for ferromagnetic films deposition; Surface and Coatings Technology; Vol. 334
Publicat: (2018)

International Joint Conference: 12th International Conference on Computational Intelligence in Security for Information Systems (CISIS 2019) and 10th International Conference on EUropean Transnational Education (ICEUTE 2019) Seville, Spain, May 13th-15th, 2019 Proceedings /
Publicat: (2020)