Citace podle APA (7th ed.)

Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Научно-образовательный центр Б. П. Вейнберга, Bleykher G. A. Galina Alekseevna, Sidelev D. V. Dmitry Vladimirovich, Grudinin V. A. Vladislav Alekseevich, Krivobokov V. P. Valery Pavlovich, & Yuryeva A. V. Alena Victorovna. (2018). Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM). 2018. https://doi.org/10.1088/1742-6596/1115/3/032065

Citace podle Chicago (17th ed.)

Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Научно-образовательный центр Б. П. Вейнберга, Bleykher G. A. Galina Alekseevna, Sidelev D. V. Dmitry Vladimirovich, Grudinin V. A. Vladislav Alekseevich, Krivobokov V. P. Valery Pavlovich, a Yuryeva A. V. Alena Victorovna. Peculiarities of Metal Coatings Deposition Using Magnetron Sputtering Systems with Hot and Evaporative Targets; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM). 2018, 2018. https://doi.org/10.1088/1742-6596/1115/3/032065.

Citace podle MLA (9th ed.)

Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Научно-образовательный центр Б. П. Вейнберга, et al. Peculiarities of Metal Coatings Deposition Using Magnetron Sputtering Systems with Hot and Evaporative Targets; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM). 2018, 2018. https://doi.org/10.1088/1742-6596/1115/3/032065.

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