Low-energy plasma-immersion implantation of nitrogen ions in titanium by a beam with ballistic focusing

Bibliographic Details
Parent link:Journal of Physics: Conference Series
Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM).— 2018.— [032043, 6 p.]
Corporate Author: Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Научная лаборатория высокоинтенсивной имплантации ионов
Other Authors: Lopatin I. V. Iljya Viktorovich, Akhmadeev Yu. K. Yury Khalyafovich, Korneva O. S. Olga Sergeevna, Krysina O. V. Olga Vasiljevna, Petrikova E. A. Elizaveta Alekseevna, Prokopenko N. A. Nikita Andreevich, Ryabchikov A. I. Aleksandr Ilyich, Sivin D. O. Denis Olegovich
Summary:Title screen
The results of experiments on low-energy implantation of nitrogen ions into VT1-0 titanium alloy are presented. Processing was performed by a nitrogen ion pulsed beam obtained using a ballistic ion focusing system. An ion source was a nitrogen plasma of the non-self-sustained gas arc discharge with a thermionic cathode. It has been shown that when the specimens are processed in such a system, hardness of the surface increases from 1.5 to 2.5 times. In addition, the surface of the specimens undergoes ion etching which causes the formation of an etching cavity whose profile depends on the ion effect parameters.
Published: 2018
Subjects:
Online Access:https://doi.org/10.1088/1742-6596/1115/3/032043
http://earchive.tpu.ru/handle/11683/57837
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=659305