Boytsova E. L. Elena Lvovna & Leonova L. A. Liliya Aleksandrovna. (2018). Investigating Thin Ti–O–N Films Deposited via Reactive Magnetron Sputtering; Bulletin of the Russian Academy of Sciences: Physics; Vol. 82, iss. 9. 2018. https://doi.org/10.3103/S1062873818090058
Չիկագոյի ոճի (17րդ խմբ.) մեջբերումBoytsova E. L. Elena Lvovna and Leonova L. A. Liliya Aleksandrovna. Investigating Thin Ti–O–N Films Deposited via Reactive Magnetron Sputtering; Bulletin of the Russian Academy of Sciences: Physics; Vol. 82, Iss. 9. 2018, 2018. https://doi.org/10.3103/S1062873818090058.
MLA (9րդ խմբ.) ՄեջբերումBoytsova E. L. Elena Lvovna and Leonova L. A. Liliya Aleksandrovna. Investigating Thin Ti–O–N Films Deposited via Reactive Magnetron Sputtering; Bulletin of the Russian Academy of Sciences: Physics; Vol. 82, Iss. 9. 2018, 2018. https://doi.org/10.3103/S1062873818090058.